Photoelectric conversion element, photodetector, photodetection system, electronic apparatus, and mobile body

ABSTRACT

A highly functional photoelectric conversion element is provided. The photoelectric conversion element includes: a first photoelectric converter that detects light in a first wavelength range and photoelectrically converts the light; a second photoelectric converter that detects light in a second wavelength range and photoelectrically converts the light to obtain distance information of a subject; and an optical filter that is disposed between the first photoelectric converter and the second photoelectric converter, and allows the light in the second wavelength range to pass therethrough more easily than the light in the first wavelength range. The first photoelectric converter includes a stacked structure and an electric charge accumulation electrode. The stacked structure includes a first electrode, a first photoelectric conversion layer, and a second electrode that are stacked in order, and the electric charge accumulation electrode is disposed to be separated from the first electrode and be opposed to the first photoelectric conversion layer with an insulating layer interposed therebetween.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a national stage application under 35 U.S.C. 371 andclaims the benefit of PCT Application No. PCT/JP2020/023712 having aninternational filing date of 17 Jun. 2020, which designated the UnitedStates, which PCT application claimed the benefit of U.S. ProvisionalPatent Application No. 62/864,907 filed 21 Jun. 2019, the entiredisclosures of each of which are incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates to a photoelectric conversion elementthat performs photoelectric conversion, and a photodetector, aphotodetection system, an electronic apparatus, and a mobile body thateach include the photoelectric conversion element.

BACKGROUND ART

There has been proposed a solid-state imaging device including a stackedstructure of a first photoelectric conversion region that receivesmainly visible light and photoelectrically converts the visible lightand a second photoelectric conversion region that receives mainlyinfrared light and photoelectrically converts the infrared light (seePTL 1, for example).

CITATION LIST Patent Literature

-   PTL 1: Japanese Unexamined Patent Application Publication No.    2017-208496

SUMMARY OF THE INVENTION

Incidentally, in a solid-state imaging device, functional improvement isdesired.

It is therefore desirable to provide a highly functional photoelectricconversion element.

A photoelectric conversion element as an embodiment of the presentdisclosure includes: a semiconductor substrate; a first photoelectricconverter that is provided on the semiconductor substrate, and detectslight in a first wavelength range including a visible light range andphotoelectrically converts the light; a second photoelectric converterthat is provided at a position overlapping the first photoelectricconverter in a thickness direction of the semiconductor substrate in thesemiconductor substrate, and detects light in a second wavelength rangeincluding an infrared light range and photoelectrically converts thelight; and an optical filter that is provided on side, opposite to thesecond photoelectric converter, of the first photoelectric converter,and allows light of a predetermined color component included in apredetermined wavelength range to pass therethrough. The firstphotoelectric converter includes a stacked structure and an electriccharge accumulation electrode. The stacked structure includes a firstelectrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode is disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic configuration diagram illustrating an example of asolid-state imaging device according to a first embodiment of thepresent disclosure.

FIG. 2A is a schematic cross-sectional view of an example of a schematicconfiguration of an imaging element applied to a pixel illustrated inFIG. 1 .

FIG. 2B is a schematic enlarged cross-sectional view of a throughelectrode and its surroundings illustrated in FIG. 2A.

FIG. 2C is a schematic enlarged plan view of the through electrode andits surroundings illustrated in FIG. 2A.

FIG. 2D is a schematic cross-sectional view of an example of a schematicconfiguration of an imaging element as a modification example applied tothe pixel illustrated in FIG. 1 .

FIG. 3 is a circuit diagram illustrating an example of a readout circuitof an iTOF sensor section illustrated in FIG. 2A.

FIG. 4 is a circuit diagram illustrating an example of a readout circuitof an organic photoelectric converter illustrated in FIG. 2A.

FIG. 5 is a schematic view of an example of an arrangement state of aplurality of pixels in a pixel section illustrated in FIG. 1 .

FIG. 6 is a schematic view of a modification example of the arrangementstate of the plurality of pixels illustrated in FIG. 5 .

FIG. 7 is a schematic cross-sectional view of an example of an imagingelement according to a second embodiment of the present disclosure.

FIG. 8 is a schematic view of an example of an arrangement state ofpixels illustrated in FIG. 7 .

FIG. 9 is a schematic view of a first modification example of thearrangement state of the pixels illustrated in FIG. 7 .

FIG. 10 is a schematic view of a second modification example of thearrangement state of the pixels illustrated in FIG. 7 .

FIG. 11 is a schematic view of a third modification example of thearrangement state of the pixels illustrated in FIG. 7 .

FIG. 12 is a schematic cross-sectional view of an example of an imagingelement according to a third embodiment of the present disclosure.

FIG. 13 is a schematic view of an example of an arrangement state ofpixels illustrated in FIG. 12 .

FIG. 14 is a schematic cross-sectional view of an example of an imagingelement according to a fourth embodiment of the present disclosure.

FIG. 15 is a schematic view of an example of an arrangement state ofpixels illustrated in FIG. 14 .

FIG. 16 is a schematic view of a modification example of the arrangementstate of the pixels illustrated in FIG. 14 .

FIG. 17 is a schematic cross-sectional view of an example of an imagingelement according to a fifth embodiment of the present disclosure.

FIG. 18 is a schematic view of an example of an arrangement state ofpixels illustrated in FIG. 17 .

FIG. 19 is a schematic view of a first modification example of thearrangement state of the pixels illustrated in FIG. 17 .

FIG. 20 is a schematic view of a second modification example of thearrangement state of the pixels illustrated in FIG. 17 .

FIG. 21A is a first schematic view of a third modification example ofthe arrangement state of the pixels illustrated in FIG. 17 .

FIG. 21B is a second schematic view of the third modification example ofthe arrangement state of the pixels illustrated in FIG. 17 .

FIG. 22 is a schematic cross-sectional view of an example of an imagingelement according to a sixth embodiment of the present disclosure.

FIG. 23 is a schematic view of an example of an arrangement state ofpixels illustrated in FIG. 22 .

FIG. 24 is a schematic view of a modification example of the arrangementstate of the pixels illustrated in FIG. 22 .

FIG. 25 is a schematic cross-sectional view of an example of an imagingelement according to a seventh embodiment of the present disclosure.

FIG. 26 is a schematic cross-sectional view of an example of an imagingelement according to an eighth embodiment of the present disclosure.

FIG. 27A is a characteristic diagram illustrating a light transmittancedistribution of a dual bandpass filter in the imaging elementillustrated in FIG. 26 .

FIG. 27B is a characteristic diagram illustrating a light transmittancedistribution of a color filter in the imaging element illustrated inFIG. 26 .

FIG. 27C is a characteristic diagram illustrating a light transmittancedistribution of an optical filter in the imaging element illustrated inFIG. 26 .

FIG. 27D is a characteristic diagram illustrating wavelength dependenceof sensitivity of an organic photoelectric conversion layer andwavelength dependence of sensitivity of a photoelectric conversionregion in the imaging element illustrated in FIG. 26 .

FIG. 28A is a characteristic diagram illustrating a light transmittancedistribution of a dual bandpass filter in a modification example of theimaging element illustrated in FIG. 26 .

FIG. 28B is a characteristic diagram illustrating a light transmittancedistribution of a color filter in the modification example of theimaging element illustrated in FIG. 26 .

FIG. 28C is a characteristic diagram illustrating a light transmittancedistribution of an optical filter in the modification example of theimaging element illustrated in FIG. 26 .

FIG. 28D is a characteristic diagram illustrating wavelength dependenceof sensitivity of an organic photoelectric conversion layer andwavelength dependence of sensitivity of a photoelectric conversionregion in the modification example of the imaging element illustrated inFIG. 26 .

FIG. 29 is a schematic cross-sectional view of an example of an imagingelement according to a ninth embodiment of the present disclosure.

FIG. 30 is a schematic cross-sectional view of an example of the imagingelement according to the ninth embodiment of the present disclosure.

FIG. 31 is a schematic view of an example of an arrangement state ofpixels illustrated in FIGS. 29 and 30 .

FIG. 32A is a first schematic view of a modification example of thearrangement state of the pixels illustrated in FIG. 31 .

FIG. 32B is a second schematic view of a modification example of thearrangement state of the pixels illustrated in FIG. 31 .

FIG. 33A is a schematic enlarged cross-sectional view of a throughelectrode and its surroundings in an imaging element according to atenth embodiment of the present disclosure.

FIG. 33B is a schematic enlarged plan view of the through electrode andits surroundings in the imaging element according to the tenthembodiment of the present disclosure.

FIG. 34A is a schematic enlarged cross-sectional view of anotherconfiguration example of details of the through electrode and itssurroundings in the imaging element according to the tenth embodiment ofthe present disclosure.

FIG. 34B is a schematic enlarged plan view of another configurationexample of details of the through electrode and its surroundings in theimaging element according to the tenth embodiment of the presentdisclosure.

FIG. 35 is a schematic cross-sectional view of an example of a schematicconfiguration of an imaging element as a modification example accordingto the tenth embodiment of the present disclosure.

FIG. 36A is a schematic view of an example of an entire configuration ofa photodetection system according to an eleventh embodiment of thepresent disclosure.

FIG. 36B is a schematic view of an example of a circuit configuration ofthe photodetection system illustrated in FIG. 36A.

FIG. 37 is a schematic view of an entire configuration example of anelectronic apparatus.

FIG. 38 is a block diagram depicting an example of a schematicconfiguration of an in-vivo information acquisition system.

FIG. 39 is a view depicting an example of a schematic configuration ofan endoscopic surgery system.

FIG. 40 is a block diagram depicting an example of a functionalconfiguration of a camera head and a camera control unit (CCU).

FIG. 41 is a block diagram depicting an example of schematicconfiguration of a vehicle control system.

FIG. 42 is a diagram of assistance in explaining an example ofinstallation positions of an outside-vehicle information detectingsection and an imaging section.

MODES FOR CARRYING OUT THE INVENTION

Some embodiments of the present disclosure are described below in detailwith reference to the drawings. It is to be noted that the descriptionis given in the following order.

1. First Embodiment

An example of a solid-state imaging device including an organicphotoelectric converter that obtains visible light image information andan iTOF sensor section that receives infrared light to obtain distanceinformation

2. Second Embodiment

An example of a solid-state imaging device in which four on-chip lenses,four color filters, and four electric charge accumulation electrodes areprovided corresponding to one photoelectric converter

3. Third Embodiment

An example of a solid-state imaging device in which sixteen on-chiplenses, sixteen color filters, and sixteen electric charge accumulationelectrodes 25 are provided corresponding to one photoelectric converter

4. Fourth Embodiment

An example of a solid-state imaging device in which four electric chargeaccumulation electrodes and four electric converters are providedcorresponding to one on-chip lens and one color filter

5. Fifth Embodiment

An example of a solid-state imaging device in which four electric chargeaccumulation electrodes are provided corresponding to one on-chip lens,one color filter, and one photoelectric converter

6. Sixth Embodiment

An example of a solid-state imaging device in which four on-chip lenses,four color filters, and sixteen electric charge accumulation electrodesare provided corresponding to one photoelectric converter

7. Seventh Embodiment

An example of a solid-state imaging device including an iTOF sensorsection that includes an electric charge holding section

8. Eighth Embodiment

An example of a solid-state imaging device further including a dualbandpass filter

9. Ninth Embodiment

An example of a solid-state imaging device further including an innerlens or a light waveguide

10. Tenth Embodiment

An example of a solid-state imaging device including a metal layer thatshields surroundings of a through electrode

11. Eleventh Embodiment

An example of a photodetection system including a light-emitting deviceand a photodetector

12. Application Example to Electronic Apparatus

13. Practical Application Example to In-vivo Information AcquisitionSystem

14. Practical Application Example to Endoscopic Surgery System

15. Practical Application Example to Mobile Body

16. Other Modification Examples

1. First Embodiment

[Configuration of Solid-State Imaging Device 1]

(Overall Configuration Example)

FIG. 1 is an overall configuration example of a solid-state imagingdevice 1 according to an embodiment of the present disclosure. Thesolid-state imaging device 1 is, for example, a CMOS (ComplementaryMetal Oxide Semiconductor) image sensor. The solid-state imaging device1 captures incident light (image light) from a subject through anoptical lens system, converts the incident light of which an image isformed on an imaging plane into an electric signal on a pixel-by-pixelbasis, and outputs the electric signal as a pixel signal. Thesolid-state imaging device 1 includes, for example, a pixel section 100as an imaging region, a vertical drive circuit 111, and a column signalprocessing circuit 112, a horizontal drive circuit 113, an outputcircuit 114, a control circuit 115, and an input/output terminal 116,which are disposed in a peripheral region of the pixel section 100, on asemiconductor substrate 11, for example. The solid-state imaging device1 is a specific example corresponding to a “photodetector” of thepresent disclosure.

The pixel section 100 includes, for example, a plurality of pixels Ptwo-dimensionally arranged in a matrix. The pixel section 100 has, forexample, a plurality of pixel rows each including a plurality of pixelsP arranged in a horizontal direction (a lateral direction of a papersurface) and a plurality of pixel columns each including a plurality ofpixels P arranged in a vertical direction (a longitudinal direction ofthe paper surface). In the pixel section 100, for example, one pixeldrive line Lread (a row selection line and a reset control line) iswired with each pixel row, and one vertical signal line Lsig is wiredwith each pixel column. The pixel drive line Lread transmits a drivesignal for signal reading from each pixel P. A plurality of pixel drivelines Lread each has one end coupled to a corresponding one of outputterminals, corresponding to the respective pixel rows, of the verticaldrive circuit 111.

The vertical drive circuit 111 includes a shift register, an addressdecoder, and the like, and is a pixel driving section that drives therespective pixels P in the pixel section 100 in pixel row units, forexample. A signal outputted from each of the pixels P in a pixel rowselected and scanned by the vertical drive circuit 111 is supplied tothe column signal processing circuit 112 through a corresponding one ofthe vertical signal lines Lsig.

The column signal processing circuit 112 includes an amplifier, ahorizontal selection switch, and the like provided for each of thevertical signal lines Lsig.

The horizontal drive circuit 113 includes a shift register, an addressdecoder, and the like, and drives respective horizontal selectionswitches of the column signal processing circuits 112 in sequence whilescanning the horizontal selection switches. Such selective scanning bythe horizontal drive circuit 113 causes the signals of the respectivepixels P transmitted through a plurality of respective vertical signallines Lsig to be outputted in sequence to a horizontal signal line 121and be transmitted to outside of the semiconductor substrate 11 throughthe horizontal signal line 121.

The output circuit 114 performs signal processing on the signalssupplied in sequence from the respective column signal processingcircuits 112 through the horizontal signal line 121, and outputs theprocessed signals. The output circuit 114 may perform, for example, onlybuffering, or may perform black level adjustment, column variationcorrection, various kinds of digital signal processing, and the like.

Circuit components including the vertical drive circuit 111, the columnsignal processing circuit 112, the horizontal drive circuit 113, thehorizontal signal line 121, and the output circuit 114 may be formeddirectly on the semiconductor substrate 11, or may be provided in anexternal control IC. Alternatively, these circuit components may beformed in another substrate coupled by a cable, or the like.

The control circuit 115 receives a clock given from the outside of thesemiconductor substrate 11, or data or the like on instructions ofoperation modes, and also outputs data such as internal information ofthe pixel P that is an imaging element. The control circuit 115 furtherincludes a timing generator that generates various timing signals, andcontrols driving of peripheral circuits such as the vertical drivecircuit 111, the column signal processing circuit 112, and thehorizontal drive circuit 113, on the basis of the various timing signalsgenerated by the timing generator.

The input/output terminal 116 exchanges signals with the outside.

(Cross-Sectional Configuration Example of Pixel P)

FIG. 2A schematically illustrates an example of a cross-sectionalconfiguration of one pixel P1 of the plurality of pixels P arranged in amatrix in the pixel section 100.

As illustrated in FIG. 2 , the pixel P1 is, for example, a so-calledlongitudinal spectral type imaging element including a structure inwhich one photoelectric converter 10 and one organic photoelectricconverter 20 are stacked in a Z-axis direction that is a thicknessdirection. The pixel P1 that is an imaging element is a specific examplecorresponding to a “photoelectric conversion element” of the presentdisclosure. The pixel P1 further includes an intermediate layer 40 and amultilayer wiring layer 30. The intermediate layer 40 is providedbetween the photoelectric converter 10 and the organic photoelectricconverter 20, and the multilayer wiring layer 30 is provided on sideopposite to the organic photoelectric converter 20 as viewed from thephotoelectric converter 10. Furthermore, for example, one sealing film51, one color filter 52, one planarization film 53, and one on-chip lens54 are stacked along the Z-axis direction in order from a position closeto the organic photoelectric converter 20 on light incident side that isopposite to the photoelectric converter 10 as viewed from the organicphotoelectric converter 20. It is to be noted that the sealing film 51and the planarization film 53 may each be provided common to a pluralityof pixels P.

(Photoelectric Converter 10)

The photoelectric converter 10 is, for example, an indirect TOF(hereinafter referred to as iTOF) sensor that obtains a distance image(distance information) by time of flight (Time-of-Flight; TOF). Thephotoelectric converter 10 includes, for example, the semiconductorsubstrate 11, the photoelectric conversion region 12, a fixed electriccharge layer 13, a pair of gate electrodes 14A and 14B, electriccharge-voltage converters (FDs) 15A and 15B that are floating diffusionregions, an inter-pixel region light-shielding wall 16, and a throughelectrode 17.

The semiconductor substrate 11 is, for example, an n-type silicon (Si)substrate having a front surface 11A and a back surface 11B, andincludes a p-well in a predetermined region. The front surface 11A isopposed to the multilayer wiring layer 30. The back surface 11B is asurface opposed to the intermediate layer 40. It is preferable that afine recessed and projected structure be formed on the back surface 11B,which is effective in confining infrared light incident on thesemiconductor substrate 11 inside the semiconductor substrate 11. It isto be noted that a similar fine recessed and projected structure may bealso formed on the front surface 11A.

The photoelectric conversion region 12 is, for example, a photoelectricconversion element including a PIN (Positive Intrinsic Negative) typephotodiode (PD), and includes a pn junction formed in a predeterminedregion of the semiconductor substrate 11. The photoelectric conversionregion 12 specifically detects and receives light having a wavelength inan infrared light range of light from a subject, generates electriccharges corresponding to the amount of received light by photoelectricconversion, and accumulates the electric charges.

The fixed electric charge layer 13 is provided to cover the back surface11B of the semiconductor substrate 11. The fixed electric charge layer13 has, for example, negative fixed electric charges to suppressgeneration of a dark current caused by an interface state of the backsurface 11B that is a light-receiving surface of the semiconductorsubstrate 11. A hole accumulation layer is formed in proximity to theback surface 11B of the semiconductor substrate 11 by an electric fieldinduced by the fixed electric charge layer 13. The hole accumulationlayer suppresses generation of electrons from the back surface 11B. Itis to be noted that the fixed electric charge layer 13 also includes aportion extending in the Z-axis direction between the inter-pixel regionlight-shielding wall 16 and the photoelectric conversion region 12. Thefixed electric charge layer 13 is preferably formed with use of aninsulating material. Specific examples of a constituent material of thefixed electric charge layer 13 include hafnium oxide (HfO_(x)), aluminumoxide (AlO_(x)), zirconium oxide (ZrO_(x)), tantalum oxide (TaO_(x)),titanium oxide (TiO_(x)), lanthanum oxide (LaO_(x)), praseodymium oxide(PrO_(x)), cerium oxide (CeO_(x)), neodymium oxide (NdO_(x)), promethiumoxide (PmO_(x)), samarium oxide (SmO_(x)), europium oxide (EuO_(x)),gadolinium oxide (GdO_(x)), terbium oxide (TbO_(x)), dysprosium oxide(DyO_(x)), holmium oxide (HoO_(x)), thulium oxide (TmO_(x)), ytterbiumoxide (YbO_(x)), lutetium oxide (LuO_(x)), yttrium oxide (YO_(x)),hafnium nitride (HfN_(x)), aluminum nitride (AlN_(x)), hafniumoxynitride (HfO_(x)N_(y)), aluminum oxynitride (AlO_(x)N_(y)), and thelike.

The pair of gate electrodes 14A and 14B are respectively included inportions of transfer transistors (TG) 141A and 141B, and extend in theZ-axis direction from the front surface 11A to the photoelectricconversion region 12, for example. The TG 141A and the TG 141Brespectively transfer electric charges accumulated in the photoelectricconversion region 12 to the pair of FDs 15A and 15D in accordance with adrive signal applied to the gate electrodes 14A and 14B.

The pair of FDs 15A and 15B are respectively floating diffusion regionsthat convert electric charges transferred from the photoelectricconversion region 12 through the TGs 141A and 141B including the gateelectrodes 14A and 14B into electric signals (e.g., voltage signals),and output the electric signals. The FDs 15A and 15B are respectivelycoupled to reset transistors (RSTs) 143A and 143B, and are respectivelycoupled to vertical signal line Lsig (FIG. 1 ) through amplificationtransistors (AMPs) 144A and 144B and selection transistors (SELs) 145Aand 145B, as illustrated in FIG. 3 to be described later.

FIG. 2B is an enlarged cross-sectional view taken along an Z axis of theinter-pixel region light-shielding wall 16 that surrounds the throughelectrode 17, and FIG. 2C is an enlarged cross-sectional view takenalong an XY plane of the inter-pixel region light-shielding wall 16 thatsurrounds the through electrode 17. FIG. 2B illustrates a cross-sectiontaken along a line IIB-IIB illustrated in FIG. 2C as viewed from thedirection of an arrow. The inter-pixel region light-shielding wall 16 isprovided in boundary portions with other adjacent pixels P in the XYplane. The inter-pixel region light-shielding wall 16 includes, forexample, a portion extending along an XZ plane and a portion extendingalong a YZ plane, and is provided to surround the photoelectricconversion region 12 of each pixel P. In addition, the inter-pixelregion light-shielding wall 16 may be provided to surround the throughelectrode 17. This makes it possible to suppress oblique incidence ofunnecessary light onto the photoelectric conversion regions 12 ofadjacent pixels P and prevent color mixture.

The inter-pixel region light-shielding wall 16 includes, for example, amaterial that includes at least one kind of elemental metals, metalalloys, metal nitrides, and metal silicides that have a light-shieldingproperty. More specific constituent materials of the inter-pixel regionlight-shielding wall 16 include Al (aluminum), Cu (copper), Co (cobalt),W (tungsten), Ti (titanium), Ta (tantalum), Ni (nickel), Mo(molybdenum), Cr (chromium), Ir (iridium), platiniridium, TiN (titaniumnitride), a tungsten-silicon compound, and the like. It is to be notedthat the constituent materials of the inter-pixel region light-shieldingwall 16 are not limited to metal materials, and the inter-pixel regionlight-shielding wall 16 may be formed with use of graphite. In addition,the inter-pixel region light-shielding wall 16 is not limited to anelectrically conductive material, and may include an electricallynon-conductive material having a light-shielding property such as anorganic material. In addition, for example, an insulating layer Z1including an insulating material such as SiOx (silicon oxide) andaluminum oxide may be provided between the inter-pixel regionlight-shielding wall 16 and the through electrode 17. Alternatively, agap may be provided between the inter-pixel region light-shielding wall16 and the through electrode 17 to insulate the inter-pixel regionlight-shielding wall 16 and the through electrode 17 from each other. Itis to be noted that the insulating layer Z1 may not be provided in acase where the inter-pixel region light-shielding wall 16 includes anelectrically non-conductive material. Furthermore, an insulating layerZ2 may be provided outside the inter-pixel region light-shielding wall16, that is, between the inter-pixel region light-shielding wall 16 andthe fixed electric charge layer 13. The insulating layer Z2 includes,for example, an insulating material such as SiOx (silicon oxide) andaluminum oxide. Alternatively, a gap may be provided between theinter-pixel region light-shielding wall 16 and the fixed electric chargelayer 13 to insulate the inter-pixel region light-shielding wall 16 andthe fixed electric charge layer 13 from each other. In a case where theinter-pixel region light-shielding wall 16 includes an electricallyconductive material, electrical insulation between the inter-pixelregion light-shielding wall 16 and the semiconductor substrate 11 issecured by the insulating layer Z2. In addition, in a case where theinter-pixel region light-shielding wall 16 is provided to surround thethrough electrode 17 and the inter-pixel region light-shielding wall 16includes an electrically conductive material, electrical insulationbetween the inter-pixel region light-shielding wall 16 and the throughelectrode 17 is secured by the insulating layer Z1.

The through electrode 17 is, for example, a coupling member thatelectrically couples a readout electrode 26 of the organic photoelectricconverter 20, which is provided on side of the back surface 11B of thesemiconductor substrate 11, to an FD 131 and an AMP 133 (see FIG. 4 tobe described later), which are provided on the front surface 11A of thesemiconductor substrate 11. The through electrode 17 is, for example, atransmission path where signal electric charges generated in the organicphotoelectric converter 20 are transmitted and a voltage that drives anelectric charge accumulation electrode 25 is transmitted. For example,it is possible to provide the through electrode 17 to extend in theZ-axis direction from the readout electrode 26 of the organicphotoelectric converter 20 to the multilayer wiring layer 30 through thesemiconductor substrate 11. The through electrode 17 is able tofavorably transfer signal electric charges generated in the organicphotoelectric converter 20, which is provided on the side of the backsurface 11B of the semiconductor substrate 11, to side of the frontsurface 11A of the semiconductor substrate 11. The fixed electric chargelayer 13 and an insulating layer 41 are provided around the throughelectrode 17, which electrically insulates the through electrode 17 anda p-well region of the semiconductor substrate 11 from each other.

It is possible to form the through electrode 17 with use of one or morekinds of metal materials such as aluminum (Al), tungsten (W), titanium(Ti), cobalt (Co), platinum (Pt), palladium (Pd), copper (Cu), hafnium(Hf), and tantalum (Ta), in addition to a silicon material doped with animpurity such as PDAS (Phosphorus Doped Amorphous Silicon).

(Multilayer Wiring Layer 30)

The multilayer wiring layer 30 includes, for example, a readout circuitincluding the TGs 141A and 141B, the RSTs 143A and 143B, the AMPs 144Aand 144B, the SELs 145A and 145B, and the like.

(Intermediate Layer 40)

The intermediate layer 40 may include, for example, the insulating layer41, and an optical filter 42 and an inter-pixel region light-shieldingfilm 43 that are embedded in the insulating layer 41. The insulatinglayer 41 includes, for example, a single-layer film including one kindof inorganic insulating materials such as silicon oxide (SiO_(x)),silicon nitride (SiNx), and silicon oxynitride (SiON), or a stacked filmincluding two or more kinds of them. Furthermore, an organic insulatingmaterial such as polymethyl methacrylate (PMMA), polyvinyl phenol (PVP),polyvinyl alcohol (PVA), polyimide, polycarbonate (PC), polyethyleneterephthalate (PET), polystyrene,N-2(aminoethyl)3-aminopropyltrimethoxysilane (AEAPTMS), 3-mercaptopropyltrimethoxysilane (MPTMS), tetraethoxysilane (TEOS), andoctadecyltrichlorosilane (OTS) may be used as a material included in theinsulating layer 41.

The optical filter 42 has a transmission band in an infrared light range(e.g., a wavelength of 880 nm to 1040 nm both inclusive) wherephotoelectric conversion is performed in the photoelectric conversionregion 12. That is, light having a wavelength in the infrared lightrange passes through the optical filter 42 more easily than light havinga wavelength in a visible light range (e.g., a wavelength of 400 nm to700 nm both inclusive). Specifically, it is possible to configure theoptical filter 42 with use of an organic material, for example, and theoptical filter 42 absorbs at least a portion of light having awavelength in the visible light range while selectively allowing lightin the infrared light range to pass therethrough.

The inter-pixel region light-shielding film 43 is provided in boundaryportions with other adjacent pixels P in the XY plane. The inter-pixelregion light-shielding film 43 includes a portion extending along the XYplane, and is provided to surround the photoelectric conversion region12 of each pixel P. The inter-pixel region light-shielding film 43suppresses oblique incidence of unnecessary light onto the photoelectricconversion regions 12 of adjacent pixels P and prevents color mixture,as with the inter-pixel region light-shielding wall 16. It is to benoted that the inter-pixel region light-shielding film 43 may beprovided as necessary; therefore, the pixel P1 may not include theinter-pixel region light-shielding film 43.

(Organic Photoelectric Converter 20)

The organic photoelectric converter 20 includes, for example, thereadout electrode 26, a semiconductor layer 21, an organic photoelectricconversion layer 22, and an upper electrode 23 that are stacked in orderfrom a position close to the photoelectric converter 10. The organicphotoelectric converter 20 further includes an insulating layer 24provided below the semiconductor layer 21, and the electric chargeaccumulation electrode 25 provided to be opposed to the semiconductorlayer 21 with the insulating layer 24 interposed therebetween. Theelectric charge accumulation electrode 25 and the readout electrode 26are separated from each other, and are provided at the same level, forexample. The readout electrode 26 is in contact with an upper end of thethrough electrode 17. It is to be noted that the upper electrode 23, theorganic photoelectric conversion layer 22, and the semiconductor layer21 may each be provided common to some pixels P of the plurality ofpixels P (FIG. 2A) in the pixel section 100, or may each be providedcommon to all the plurality of pixels P in the pixel section 100. Thesame applies to other embodiments, modification examples, and the liketo be described after the present embodiment.

It is to be noted that another organic layer may be provided eachbetween the organic photoelectric conversion layer 22 and thesemiconductor layer 21 and between the organic photoelectric conversionlayer 22 and the upper electrode 23.

The readout electrode 26, the upper electrode 23, and the electriccharge accumulation electrode 25 each include an electrically conductivefilm having light transmissivity, and include, for example, ITO (indiumtin oxide). However, in addition to ITO, a tin oxide (SnOx)-basedmaterial doped with a dopant, or a zinc oxide-based material obtained bydoping zinc oxide (ZnO) with a dopant may be used as constituentmaterials of the readout electrode 26, the upper electrode 23, and theelectric charge accumulation electrode 25. Examples of the zincoxide-based material include aluminum zinc oxide (AZO) doped withaluminum (Al) as a dopant, gallium zinc oxide (GZO) doped with gallium(Ga), and indium zinc oxide (IZO) doped with indium (In). In addition,as the constituent materials of the readout electrode 26, the upperelectrode 23, and the electric charge accumulation electrode 25, CuI,InSbO₄, ZnMgO, CuInO₂, MgIN₂O₄, CdO, ZnSnO₃, TiO₂, or the like may beused. Furthermore, a spinel oxide, an oxide having a YbFe₂O₄ structuremay be used.

The organic photoelectric conversion layer 22 converts light energy intoelectrical energy, and is formed including two or more kinds of organicmaterials functioning as a p-type semiconductor and a n-typesemiconductor. The p-type semiconductor relatively functions as anelectron donor (a donor), and the n-type semiconductor relativelyfunctions as an electron acceptor (an acceptor). The organicphotoelectric conversion layer 22 has a bulk heterojunction structure ina layer. The bulk heterojunction structure is a p/n junction surfacethat is formed by mixing the p-type semiconductor and the n-typesemiconductor, and excitons generated upon absorption of light aredissociated into electrons and holes at the p/n junction surface.

The organic photoelectric conversion layer 22 may further include, inaddition to the p-type semiconductor and the n-type semiconductor, threekinds of so-called dye materials that photoelectrically convert light ina predetermined wavelength band while allowing light in anotherwavelength band to pass therethrough. The p-type semiconductor, then-type semiconductor, and the dye materials preferably have absorptionmaximum wavelengths different from each other. This makes it possible toabsorb wavelengths in a visible light region in a wide range.

For example, various kinds of organic semiconductor materials describedabove are mixed, and spin coating technology is used, thereby making itpossible to form the organic photoelectric conversion layer 22. Inaddition, the organic photoelectric conversion layer 22 may be formedwith use of a vacuum deposition method, printing technology, or thelike, for example.

As a material included in the semiconductor layer 21, a material havinga large band gap value (e.g., a band gap value of 3.0 eV or greater) andhaving higher mobility than a material included in the organicphotoelectric conversion layer 22 is preferably used. Specific materialsthereof may include organic semiconductor materials such as oxidesemiconductor materials including IGZO and the like, transition metaldichalcogenide, silicon carbide, diamond, graphene, carbon nanotubes, acondensed polycyclic hydrocarbon compound, and a condensed heterocycliccompound.

The electric charge accumulation electrode 25 forms a kind of capacitortogether with the insulating layer 24 and the semiconductor layer 21,and accumulates electric charges generated in the organic photoelectricconversion layer 22 in a portion of the semiconductor layer 21, e.g., aregion portion, corresponding to the electric charge accumulationelectrode 25 with the insulating layer 24 interposed therebetween, ofthe semiconductor layer 21. In the present embodiment, one electriccharge accumulation electrode 25 is provided corresponding to onephotoelectric conversion region 12, one color filter 52, and one on-chiplens 54. The electric charge accumulation electrode 25 is coupled to thevertical drive circuit 111, for example.

It is possible to form the insulating layer 24 with use of, for example,an inorganic insulating material and an organic insulating material, aswith the insulating layer 41.

The organic photoelectric converter 20 detects some or all of thewavelengths in the visible light range, as described above. In addition,it is desirable that the organic photoelectric converter 20 not havesensitivity to the infrared light range.

In the organic photoelectric converter 20, light incident from side ofthe upper electrode 23 is absorbed by the organic photoelectricconversion layer 22. Excitons (electron-hole pairs) thereby generatedmove to an interface between the electron donor and the electronacceptor included in the organic photoelectric conversion layer 22, andthe excitons are dissociated, that is, the excitons are dissociated intoelectrons and holes. Electric charges generated herein, that is,electrons and holes move to the upper electrode 23 or the semiconductorlayer 21 by diffusion resulting from a difference in concentrationbetween carriers and an internal electric field resulting from apotential difference between the upper electrode 23 and the electriccharge accumulation electrode 25, and are detected as photocurrent. Forexample, it is assumed that the readout electrode 26 is a positivepotential and the upper electrode 23 is a negative potential. In thiscase, holes generated by photoelectric conversion in the organicphotoelectric conversion layer 22 move to the upper electrode 23.Electrons generated by photoelectric conversion in the organicphotoelectric conversion layer 22 are drawn to the electric chargeaccumulation electrode 25, and are accumulated in the portion of thesemiconductor layer 21, e.g., the region portion, corresponding to theelectric charge accumulation electrode 25 with the insulating layer 24interposed therebetween, of the semiconductor layer 21.

Electric charges (e.g., electrons) accumulated in the region portion,corresponding to the electric charge accumulation electrode 25 with theinsulating layer 24 interposed therebetween, of the semiconductor layer21 are read out as follows. Specifically, a potential V26 is applied tothe readout electrode 26, and a potential V25 is applied to the electriccharge accumulation electrode 25. Herein, the potential V26 is higherthan the potential V25 (V25<V26). By doing so, the electrons accumulatedin the region portion, corresponding to the electric charge accumulationelectrode 25, of the semiconductor layer 21 are transferred to thereadout electrode 26.

As described above, the semiconductor layer 21 is provided below theorganic photoelectric conversion layer 22, and electric charges (e.g.,electrons) are accumulated in the region portion, corresponding to theelectric charge accumulation electrode 25 with the insulating layer 24interposed therebetween, of the semiconductor layer 21, therebyachieving the following effects. That is, as compared with a case whereelectric charges (e.g., electrons) are accumulated in the organicphotoelectric conversion layer 22 without providing the semiconductorlayer 21, it is possible to prevent recombination of holes and electronsduring electric charge accumulation, and increase transfer efficiency ofaccumulated electric charges (e.g., electrons) to the readout electrode26, and it is possible to suppress generation of a dark current. A casewhere electrons are read out is described above as an example; however,holes may be read out. In a case where holes are read out, thepotentials described above are described as potentials sensed by holes.

(Readout Circuit of Photoelectric Converter 10)

FIG. 3 is a circuit diagram illustrating an example of a readout circuitof the photoelectric converter 10 included in the pixel P illustrated inFIG. 2A.

The readout circuit of the photoelectric converter 10 includes, forexample, the TGs 141A and 141B, an OFG 146, the FDs 15A and 15B, theRSTs 143A and 143B, the AMPS 144A and 144B, and the SELs 145A and 145B.

The TGs 141A and 141B are respectively coupled between the photoelectricconversion region 12 and the FD 15A and between the photoelectricconversion region 12 and the FD 15B. A drive signal is applied to thegate electrodes 14A and 14B of the TGs 141A and 141B to turn the TGs141A and 141B to an active state, which turns transfer gates of the TGs141A and 141B to an electrically conductive state. As a result, signalelectric charges converted in the photoelectric conversion region 12 aretransferred to the FDs 15A and 15B respectively through the TGs 141A and141B.

The OFG 146 is coupled between the photoelectric conversion region 12and a power supply. A drive signal is applied to a gate electrode of theOFG 146 to turn the OFG 146 to the active state, which turns the OFG 146to the electrically conductive state. As a result, signal electriccharges converted in the photoelectric conversion region 12 aredischarged to the power supply through the OFG 146.

The FDs 15A and 15B are respectively coupled between the TG 141A and AMP144A and between the TG 141B and the AMP 144B. The FDs 15A and 15Brespectively perform electric charge-voltage conversion of the signalelectric charges transferred from the TGs 141A and 141B into voltagesignals, and output the voltage signals to the AMPs 144A and 144B.

The RSTs 143A and 143B are respectively coupled between the FD 15A andthe power supply and between the FD 15B and the power supply. A drivesignal is applied to gate electrodes of the RSTs 143A and 143B to turnthe RSTs 143A and 143B to the active state, which turns reset gates ofthe RSTs 143A and 143B to the electrically conductive state. As aresult, potentials of the FDs 15A and 15B are reset to a power supplylevel.

The AMPs 144A and 144B respectively include gate electrodes coupled tothe FDs 15A and 15B, and include drain electrodes coupled to the powersupply. The AMPs 144A and 144B are input sections of readout circuits ofvoltage signals held by the FDs 15A and 15B, that is, so-called sourcefollower circuits. That is, the AMPs 144A and 144B respectively havesource electrodes coupled to the vertical signal line Lsig through theSELs 145A and 145B, thereby configuring source follower circuits with aconstant current source coupled to one end of the vertical signal lineLsig.

The SELs 145A and 145B are respectively coupled between the sourceelectrode of the AMP 144A and the vertical signal line Lsig and betweenthe source electrode of the AMP 144B and the vertical signal line Lsig.A drive signal is applied to the respective gate electrodes of the SELs145A and 145B to turn the SELs 145A and 145B to the active state, whichturns the SELs 145A and 145B to the electrically conductive state toturn the pixel P to a selection state. Accordingly, readout signals(pixel signals) outputted from the AMPs 144A and 144B are respectivelyoutputted to the vertical signal line Lsig through the SELs 145A and145B.

In the solid-state imaging device 1, a light pulse in an infrared rangeis applied to a subject, and the photoelectric conversion region 12 ofthe photoelectric converter 10 receives the light pulse reflected fromthe subject. In the photoelectric conversion region 12, a plurality ofelectric charges are generated by incidence of the light pulse in theinfrared range. The plurality of electric charges generated in thephotoelectric conversion region 12 are alternately distributed to the FD15A and the FD 15B by alternately supplying a drive signal to the pairof gate electrodes 14A and 14B over equal time intervals. A shutterphase of the drive signal to be applied to the gate electrodes 14A and14B is changed with respect to the light pulse to be applied, whichcauses the amount of electric charges accumulated in the FD 15A and theamount of electric charges accumulated in the FD 15B to bephase-modulated values. A round trip time of the light pulse isestimated by demodulating these values, thereby determining a distancebetween the solid-state imaging device 1 and the subject.

(Readout Circuit of Organic Photoelectric Converter 20)

FIG. 4 is a circuit diagram illustrating an example of the readoutcircuit of the organic photoelectric converter 20 included in the pixelP1 illustrated in FIG. 2A.

The readout circuit of the organic photoelectric converter 20 includes,for example, the FD 131, a RST 132, the AMP 133, and a SEL 134.

The FD 131 is coupled between the readout electrode 26 and the AMP 133.The FD 131 performs electric charge-voltage conversion of signalelectric charges transferred from the readout electrode 26 into voltagesignals, and outputs the voltage signals to the AMP 133.

The RST 132 is coupled between the FD 131 and the power supply. A drivesignal is applied to a gate electrode of the RST 132 to turn the RST 132to the active state, which turns a reset gate of the RST 132 to theelectrically conductive state. As a result, a potential of the FD 131 isreset to the power supply level.

The AMP 133 includes a gate electrode coupled to the FD 131 and a drainelectrode coupled to the power supply. A source electrode of the AMP 133is coupled to the vertical signal line Lsig through the SEL 134.

The SEL 134 is coupled between the source electrode of the AMP 133 andthe vertical signal line Lsig. A drive signal is applied to a gateelectrode of the SEL 134 to turn the SEL 134 to the active state, whichturns the SEL 134 to the electrically conductive state to turn the pixelP1 to the selection state. Thus, a readout signal (a pixel signal)outputted from the AMP 133 is outputted to the vertical signal line Lsigthrough the SEL 134.

(Planar Configuration Example of Pixel P1)

FIG. 5 schematically illustrates an example of an arrangement state ofthe plurality of pixels P1 in the pixel section 100. (A) to (D) of FIG.5 respectively illustrate arrangement states at height positionscorresponding to levels Lv1 to Lv3 and Lv5 in the Z-axis directionillustrated in FIG. 2A. That is, (A) of FIG. 5 illustrates anarrangement state of the on-chip lenses 54 in the XY plane, (B) of FIG.5 illustrates an arrangement state of the color filters 52 in the XYplane, (C) of FIG. 5 illustrates an arrangement state of the electriccharge accumulation electrodes 25 and the readout electrodes 26 in theXY plane, and (D) of FIG. 5 illustrates an arrangement state of thephotoelectric conversion regions 12 and the through electrodes 17 in theXY plane. In (D) of FIG. 5 , a planar shape of the inter-pixel regionlight-shielding film 43 at a height position corresponding to a levelLv4 is illustrated by a broken line. As illustrated in (A) to (D) ofFIG. 5, in the pixel section 100, one on-chip lens 54, one color filter52, one electric charge accumulation electrode 25, and one photoelectricconversion region 12 are provided at positions corresponding to eachother in the Z-axis direction. The positions corresponding to each otherherein are, for example, positions overlapping each other in the Z-axisdirection. Alternatively, the positions are not limited thereto, and itis sufficient if light incident on one on-chip lens 54 sequentiallyenters one color filter 52, the organic photoelectric converter 20provided common to a plurality of pixels P1, and one photoelectricconversion region 12, and electric charges generated by photoelectricconversion in the organic photoelectric converter 20 are drawn to oneelectric charge accumulation electrode 25 to be accumulated in theportion of the semiconductor layer 21, e.g., the region portion,corresponding to the electric charge accumulation electrode 25 with theinsulating layer 24 interposed therebetween, of the semiconductor layer21. In addition, in a case where one on-chip lens 54, one color filter52, one electric charge accumulation electrode 25 and one photoelectricconversion region 12 are provided at positions overlapping each other inthe Z-axis direction, central positions thereof may or may not coincidewith each other. It is to be noted that FIG. 5 illustrates a planarconfiguration example of a total of sixteen pixels P1 arranged four byfour in an X-axis direction and a Y-axis direction; however, in thepixel section 100, for example, a plurality of groups of these sixteenpixels P1 is arranged in both the X-axis direction and the Y-axisdirection.

In the example in FIG. 5 , as illustrated in (B), one red pixel PR1 thatincludes a red color filter 52R and receives red light, one blue pixelPB1 that includes a blue color filter 52B and receives blue light, andtwo green pixels PG1 that each include a green color filter 52G andreceive green light are included in one pixel group PP1. The arrangementstate of a plurality of pixels P illustrated in (B) of FIG. 5 is aso-called Bayer arrangement. The red pixels PR1 are alternately arrangedin the X-axis direction and the Y-axis direction. The blue pixels PB1are alternately arranged in the X-axis direction and the Y-axisdirection, and are positioned in an oblique direction with respect tothe red pixels PR1. The green pixels PG1 are arranged to fill in gapsbetween the red pixels PR1 and the blue pixels PB1. It is to be notedthat FIG. 5 is an example, and the arrangement state of the plurality ofpixels P1 in the pixel section 100 of the present disclosure is notlimited thereto.

As illustrated in (C) of FIG. 5 , the readout electrodes 26 areprovided, one for each pixel group PP1. Specifically, one readoutelectrode 26 is disposed in a gap around the middle of four electriccharge accumulation electrodes 25 in one pixel group PP1. It is to benoted that FIG. 5 is an example, and the arrangement positions of thereadout electrodes 26 in the pixel section 100 of the present disclosureare not limited thereto. In the example in FIG. 5 , the readoutelectrode 26 is provided in the middle of four pixels P included in onepixel group PP1, which causes distances from the respective electriccharge accumulation electrodes 25 of the four pixels P to the readoutelectrode 26 to be substantially equal to each other. This is suitablefor sharing the readout electrode 26 by adjacent pixels P.

As illustrated in (D) of FIG. 5 , the through electrodes 17 areprovided, one for each pixel P. Specifically, one through electrode 17is disposed in a gap around four corners of the photoelectric conversionregions 12 in respective pixels P. The through electrodes 17 aredisposed around the corners of the photoelectric conversion regions 12in such a manner, which makes it possible to further increase areas ofthe photoelectric conversion regions 12. It is to be noted that FIG. 5is an example, and the arrangement positions of the through electrodes17 in the pixel section 100 of the present disclosure are not limitedthereto. For example, as illustrated in FIG. 6 , the through electrodes17 may be further disposed in proximity to boundaries between adjacentphotoelectric conversion regions 12 at midpoints of four corners in eachof the photoelectric conversion regions 12. FIG. 6 schematicallyillustrates a modification example of the arrangement state of theplurality of pixels P1 in the pixel section 100 illustrated in FIG. 1 .As illustrated in (D) of FIG. 5 and (D) of FIG. 6 , it is preferablethat the through electrodes 17 and the readout electrodes 26 be providedat positions not overlapping vicinities of centers of the on-chip lenses54 in the Z-axis direction. This makes it possible to increase the lightamount of infrared light that is able to enter the photoelectricconversion regions 12, and is advantageous to improve infrared lightdetection sensitivity in each pixel P1. It is to be noted that thepresent disclosure is not limited to forms illustrated in FIGS. 5 and 6. For example, the through electrodes 17 may be disposed only atmidpoints of four corners in the photoelectric conversion regions 12without disposing the through electrodes 17 at four corners in thephotoelectric conversion regions 12. In addition, a plurality of throughelectrodes 17 are disposed as symmetrical as possible in a planeorthogonal to the Z axis with respect to the photoelectric conversionregion 12 in each pixel P, which improves optical characteristics in thephotoelectric conversion region 12. That is, this improves uniformity ofphotoelectric conversion characteristics in the plane orthogonal to theZ axis in the photoelectric conversion region 12 in a case where thephotoelectric conversion region 12 receives obliquely incident light,for example.

As illustrated in (D) of FIG. 5 and (D) of FIG. 6 , the inter-pixelregion light-shielding film 43 is provided in boundary portions withother adjacent pixels P1 in the XY plane to form a grid pattern as awhole. The inter-pixel region light-shielding film 43 is provided tosurround the photoelectric conversion region 12 of each pixel P1, andincludes a plurality of opening portions 43K. As described above, theinter-pixel region light-shielding film 43 suppresses oblique incidenceof unnecessary light onto the photoelectric conversion regions 12 ofadjacent pixels P1, and prevents color mixture. Herein, the centralposition of each of the opening portions 43K in the inter-pixel regionlight-shielding film 43 may be shifted from the central position of acorresponding one of the pixels P1. One reason for this is to reducevariations in detection characteristics of the plurality of pixels P1arranged in the pixel section 100, e.g., to prevent a decrease indetection sensitivity of the pixels P1 arranged in a peripheral portionof the pixel section 100. In this case, the shift amount of the centralposition of each of the opening portions 43K with respect to the centralposition of a corresponding one of the pixels P1 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, the shift amount may be nonlinearlychanged from the center of the pixel section 100 to the peripheralportion of the pixel section 100. Doing so makes it possible to furtherimprove shading characteristics at an end portion of the pixel section100.

Furthermore, a spacing between adjacent pixels P1 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P1 arranged in the pixel section 100, for example.

[Workings and Effects of Solid-State Imaging Device 1]

The solid-state imaging device 1 according to the present embodimentincludes the organic photoelectric converter 20, the optical filter 42,and the photoelectric converter 10 that are stacked in order fromincident side. The organic photoelectric converter 20 detects lighthaving a wavelength in the visible light range and photoelectricallyconvert the light. The optical filter 42 has a transmission band in theinfrared light range. The photoelectric converter 10 detects lighthaving a wavelength in the infrared light range and photoelectricallyconverts the light. This makes it possible to simultaneously obtain avisible light image and an infrared light image at the same position inan in-plane direction of the XY plane. The visible light image isconfigured by a red light signal, a green light signal, and a blue lightsignal respectively obtained from the red pixel PR, the green pixel PG,and the blue pixel PB, and the infrared light image uses infrared lightsignals obtained from all the plurality of pixels P. It is thereforepossible to achieve high integration in the in-plane direction of the XYplane.

Furthermore, the photoelectric converter 10 includes the pair of gateelectrodes 14A and 14B, and the FDs 15A and 15B, which makes it possibleto obtain an infrared light image as a distance image includinginformation about a distance to a subject. Therefore, according to thesolid-state imaging device 1 according to the present embodiment, it ispossible to obtain both a visible light image having high resolution andan infrared light image having depth information.

In the present embodiment, the organic photoelectric converter 20includes the insulating layer 24 and the electric charge accumulationelectrode 25, in addition to the structure in which the readoutelectrode 26, the semiconductor layer 21, the organic photoelectricconversion layer 22, and the upper electrode 23 are stacked in order.The insulating layer 24 is provided below the semiconductor layer 21,and the electric charge accumulation electrode 25 is provided to beopposed to the semiconductor layer 21 with the insulating layer 24interposed therebetween. This makes it possible to accumulate electriccharges generated by photoelectric conversion in the organicphotoelectric conversion layer 22 in the portion of the semiconductorlayer 21, e.g., the region portion, corresponding to the electric chargeaccumulation electrode 25 with the insulating layer 24 interposedtherebetween, of the semiconductor layer 21. This makes it possible toachieve removal of electric charges in the semiconductor layer 21, thatis, full depletion of the semiconductor layer 21 upon start of exposure,for example. As a result, it is possible to reduce kTC noise, whichmakes it possible to suppress a decrease in image quality caused byrandom noise. Furthermore, as compared with a case where electriccharges (e.g., electrons) are accumulated in the organic photoelectricconversion layer 22 without providing the semiconductor layer 21, it ispossible to prevent recombination of holes and electrons during electriccharge accumulation, and increase transfer efficiency of accumulatedelectric charges (e.g., electrons) to the readout electrode 26, and itis possible to suppress generation of a dark current.

It is to be noted that in the present disclosure, as with a pixel P1Aillustrated in FIG. 2D, the semiconductor layer 21 may not be provided.In the pixel P1A illustrated in FIG. 2D, the organic photoelectricconversion layer 22 is coupled to the readout electrode 26, and theelectric charge accumulation electrode 25 is provided to be opposed tothe organic photoelectric conversion layer 22 with the insulating layer24 interposed therebetween. In a case of such a configuration, electriccharges generated by photoelectric conversion in the organicphotoelectric conversion layer 22 are accumulated in the organicphotoelectric conversion layer 22. Even in this case, upon photoelectricconversion in the organic photoelectric conversion layer 22, a kind ofcapacitor is formed by the organic photoelectric conversion layer 22,the insulating layer 24, and the electric charge accumulation electrode25. This makes it possible to achieve removal of electric charges in theorganic photoelectric conversion layer 22, that is, full depletion ofthe organic photoelectric conversion layer 22 upon start of exposure,for example. As a result, it is possible to reduce kTC noise, whichmakes it possible to suppress a decrease in image quality caused byrandom noise.

In addition, in the present embodiment, one on-chip lens 54, one colorfilter 52, one electric charge accumulation electrode 25, and onephotoelectric conversion region 12 are provided at positionscorresponding to each other in the Z-axis direction in the pixel section100. This makes it possible to obtain an infrared light signal at aposition corresponding to each of the red pixel PR1, the green pixelPG1, and the blue pixel PB1. Accordingly, in the pixel P1 according tothe present embodiment, an infrared light image having high resolutionis obtained, as compared with a pixel P2 according to a secondembodiment to be described later and a pixel P3 according to a thirdembodiment to be described later.

It is to be noted that in the present embodiment, the red color filter52R, the green color filter 52G, and the blue color filter 52B areincluded, and respectively receive red light, green light, and bluelight to obtain a color visible light image; however, a monochromaticvisible light image may be obtained without providing the color filter52.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the on-chip lenses 52 in the Z-axisdirection, which makes it possible to improve infrared light detectionsensitivity in each pixel P1.

2. Second Embodiment

[Configuration of Pixel P2]

FIG. 7 schematically illustrates an example of a cross-sectionalconfiguration in the pixel P2 as an imaging element according to thesecond embodiment. FIG. 8 schematically illustrates an example of anarrangement state in an XY plane of a plurality of pixels P2. The pixelP2 is applicable as the pixel P included in the pixel section 100 in thesolid-state imaging device 1 illustrated in FIG. 1 , as with the pixelP1 as the imaging element according to the first embodiment describedabove. However, in the present embodiment, as illustrated in FIG. 8 ,four pixels P2 are included in one pixel group PP2, and share onephotoelectric converter 10. Accordingly, in a case where the pixel P2according to the present embodiment is used as the pixel P illustratedin FIG. 1 , as an example, driving of the organic photoelectricconverter 20 including one electric charge accumulation electrode 25 maybe performed in the pixel P2 as a unit, and driving of one photoelectricconverter 10 may be performed in the pixel group PP2 as a unit. It is tobe noted that two through electrodes 17 and two readout electrodes 26 incontact with upper ends of the through electrodes 17 are illustrated onthe left and the right in FIG. 7 , and the readout electrode 26 on theright appears to be separated from the semiconductor layer 21. However,in actuality, the readout electrode 26 on the right is also coupled tothe semiconductor player 21 in a cross-section different from across-section illustrated in FIG. 7 .

(A) to (D) of FIG. 8 respectively illustrate arrangement states atheight positions corresponding to levels Lv1 to Lv3 and Lv5 in theZ-axis direction illustrated in FIG. 7 . That is, (A) of FIG. 8illustrates an arrangement state of the on-chip lenses 54 in the XYplane, (B) of FIG. 8 illustrates an arrangement state of the colorfilters 52 in the XY plane, (C) of FIG. 8 illustrates an arrangementstate of the electric charge accumulation electrodes 25 in the XY plane,and (D) of FIG. 8 illustrates an arrangement state of the photoelectricconversion regions 12, the through electrodes 17, and the readoutelectrodes 26 in the XY plane. It is to be noted that in FIG. 8 , tosecure visibility, the readout electrodes 26 are also illustrated in(D). In addition, in (B) of FIG. 8 , a sign PR2 indicates the pixel P2of red, a sign PG2 indicates the pixel P2 of green, and a sign PB2indicates the pixel P2 of blue. The color arrangement of the colorfilters 52 is not specifically limited, and may be, for example, a Bayerarrangement.

In the first embodiment described above, in the pixel section 100, oneon-chip lens 54, one color filter 52, one electric charge accumulationelectrode 25, and one photoelectric conversion region 12 are provided atpositions corresponding to each other in the Z-axis direction. Incontrast, in the present embodiment, four on-chip lenses 54, four colorfilters 52, and four electric charge accumulation electrodes 25 areprovided, corresponding to one photoelectric conversion region 12, atpositions corresponding to each other in the Z-axis direction. Morespecifically, the on-chip lenses 54, the color filters 52, and theelectric charge accumulation electrodes 25 are arranged, correspondingto one photoelectric conversion region 12, in two columns in the X-axisdirection and two rows in the Y-axis direction. That is, in the presentembodiment, as illustrated in FIGS. 7 and 8 , each of the pixels P2includes one on-chip lens 54, one color filter 52, and one electriccharge accumulation electrode 25, four pixels P2 adjacent to each otherin both the X-axis direction and the Y-axis direction are included inone pixel group PP2, and the four pixels P2 share one photoelectricconverter 10. The configuration of the pixel P2 is substantially thesame as the configuration of the pixel P1, except for this point. It isto be noted that (D) of FIG. 8 illustrates an example in which thethrough electrodes 17 and the readout electrodes 26 are disposed inproximity to boundaries between adjacent photoelectric conversionregions 12 at respective four corners in each of the photoelectricconversion regions 12.

[Workings and Effects of Pixel P2]

The pixel P2 according to the present embodiment has the configurationdescribed above, which makes it possible to simultaneously obtain avisible light image and an infrared light image including distanceinformation at the same position in an in-plane direction. Furthermore,according to the pixel P2, as compared with a case where the pluralityof pixels P1 is included in the pixel section 100, it is possible toreduce a difference in infrared light detection sensitivity among theplurality of pixels P2 included in the pixel section 100. In a casewhere the pixel section 100 includes the plurality of pixels P1,transmittance of infrared light passing through the color filter 52differs depending on colors of the color filters 52. Accordingly,intensity of infrared light reaching the photoelectric conversion region12 differs among the red pixel PR1, the blue pixel PB1, and the greenpixel PG1. This causes a difference in infrared light detectionsensitivity among the plurality of pixels P1 included in one pixel groupPP1. In that respect, according to the pixel P2 according to the presentembodiment, infrared light having passed through each of one colorfilter 52R, one color filter 52B, and two color filters 52G enters eachphotoelectric conversion region 12. This makes it possible to reduce adifference in infrared light detection sensitivity caused among aplurality of pixel groups PP2.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the respective on-chip lenses 54 in theZ-axis direction, which makes it possible to improve infrared lightdetection sensitivity in each pixel P2.

In addition, even in a case where the plurality of pixels P2 accordingto the present embodiment is arranged, the central position of each ofthe opening portions 43K in the inter-pixel region light-shielding film43 may be shifted from the central position of a corresponding one ofthe pixels P2. One reason for this is to reduce variations in detectioncharacteristics of the plurality of pixels P2 arranged in the pixelsection 100, e.g., to prevent a decrease in detection sensitivity of thepixels P2 arranged in the peripheral portion of the pixel section 100.In this case, the shift amount of the central position of each of theopening portions 43K with respect to the central position of acorresponding one of the pixels P2 may be increased from the center ofthe pixel section 100 to the peripheral portion of the pixel section100. In particular, it is preferable that the shift amount benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100.

Furthermore, a spacing between adjacent pixels P2 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P2 arranged in the pixel section 100, for example.

It is to be noted that FIG. 8 is an example, and the arrangement stateof the through electrodes 17 and the arrangement state of the readoutelectrodes 26 in the plurality of pixels P2 arranged in the pixelsection 100 of the present disclosure are not limited thereto. Forexample, as illustrated in FIG. 9 , the through electrodes 17 may bedisposed in proximity to boundaries between adjacent photoelectricconversion regions 12 at midpoints of four corners in each of thephotoelectric conversion regions 12. FIG. 9 schematically illustrates afirst modification example of the arrangement state of the plurality ofpixels P2 in the pixel section 100. Alternatively, as illustrated inFIG. 10 , the through electrodes 17 may be disposed in proximity toboundaries between adjacent photoelectric conversion regions 12 at bothfour corners in each of the photoelectric conversion regions 12 andmidpoints of the four corners in each of the photoelectric conversionregions 12. FIG. 10 schematically illustrates a second modificationexample of the arrangement state of the plurality of pixels P2 in thepixel section 10. Furthermore, as illustrated in FIG. 11 , one on-chiplens 54A having a size corresponding to two on-chip lenses 54 may bedisposed in place of two on-chip lenses 54 arranged side by side in theX-axis direction. FIG. 11 schematically illustrates a third modificationexample of the arrangement state of the plurality of pixels P2 in thepixel section 100. In an example in FIG. 11 , both the color filters 52disposed directly below the on-chip lens 54A are, for example, the greencolor filters 52G that allows green to pass therethrough. Accordingly,light having passed through the on-chip lens 54A is received by twopixels PG2, which makes it possible to obtain image plane phasedifference information. It is to be noted that the color arrangement ofthe color filters 52 is not specifically limited, and the colorarrangement other than a portion corresponding to the on-chip lens 54Amay be, for example, a Bayer arrangement. In addition, in FIG. 11 , thethrough electrodes 17 and the readout electrodes 26 are disposed atpositions of four corners in each of the photoelectric conversionregions 12; however, the present disclosure is not limited thereto. Forexample, in addition to the configuration in FIG. 11 , the throughelectrodes 17 may be further disposed in proximity to boundaries betweenthe adjacent photoelectric conversion regions 12 at midpoints of thefour corners in each of the photoelectric conversion regions 12.Alternatively, the through electrodes 17 may not be disposed at the fourcorners in each of the photoelectric conversion regions 12, and may bedisposed only at the midpoints of the four corners in each of thephotoelectric conversion regions 12.

3. Third Embodiment

[Configuration of Pixel P3]

FIG. 12 schematically illustrates an example of a cross-sectionalconfiguration of the pixel P3 as an imaging element according to thethird embodiment. FIG. 13 is a schematic view of an example of anarrangement state in an XY plane of a plurality of pixels P3. The pixelP3 is applicable as the pixel P included in the pixel section 100 in thesolid-state imaging device 1 illustrated in FIG. 1 , as with the pixelP1 as the imaging element according to the first embodiment describedabove. However, in the present embodiment, as illustrated in FIG. 13 ,sixteen pixels P3 are included in one pixel group PP3, and share onephotoelectric converter 10. Accordingly, in a case where the pixel P3according to the present embodiment is used as the pixel P illustratedin FIG. 1 , as an example, driving of the organic photoelectricconverter 20 including one electric charge accumulation electrode 25 maybe performed in the pixel P3 as a unit, and driving of one photoelectricconverter 10 may be performed in the pixel group PP3 as a unit.

(A) to (D) of FIG. 13 respectively illustrate arrangement states atheight positions corresponding to levels Lv1 to Lv3 and Lv5 in theZ-axis direction illustrated in FIG. 12 . That is, (A) of FIG. 13illustrates an arrangement state of the on-chip lenses 54 in the XYplane, (B) of FIG. 13 illustrates an arrangement state of the colorfilters 52 in the XY plane, (C) of FIG. 13 illustrates an arrangementstate of the electric charge accumulation electrodes 25 and the readoutelectrodes 26 in the XY plane, and (D) of FIG. 13 illustrates anarrangement state of the photoelectric conversion regions 12 and thethrough electrodes 17 in the XY plane. It is to be noted that in FIG. 13, to secure visibility, the readout electrodes 26 are also illustratedin (D). In addition, (C) of FIG. 13 illustrates the electric chargeaccumulation electrode 25 and the readout electrode 26 that partiallyoverlap each other; however, in actuality, the electric chargeaccumulation electrode 25 and the readout electrode 26 are disposed tobe separated from each other. Furthermore, in (B) of FIG. 13 , a signPR3 indicates the pixel P3 of red a sign PG3 indicates the pixel P3 ofgreen, and a sign PB3 indicates the pixel P3 of blue. It is to be notedthat the color arrangement of the color filters 52 is not specificallylimited, and may be, for example, a Bayer arrangement.

In the first embodiment described above, in the pixel section 100, oneon-chip lens 54, one color filter 52, one electric charge accumulationelectrode 25, and one photoelectric conversion region 12 are provided atpositions corresponding to each other in the Z-axis direction. Incontrast, in the present embodiment, sixteen on-chip lenses 54, sixteencolor filters 52, and sixteen electric charge accumulation electrodes 25are provided, corresponding to one photoelectric conversion region 12,at positions corresponding to each other in the Z-axis direction. Morespecifically, the on-chip lenses 54, the color filters 52, and theelectric charge accumulation electrodes 25 are arranged, correspondingto one photoelectric conversion region 12, in four columns in the X-axisdirection and four rows in the Y-axis direction. That is, in the presentembodiment, as illustrated in FIGS. 12 and 13 , sixteen pixels P3adjacent to each other in both the X-axis direction and the Y-axisdirection are included in one pixel group PP3, and share onephotoelectric converter 10. The configuration of the pixel P3 issubstantially the same as the configuration of the pixel P1, except forthis point. It is to be noted that (D) of FIG. 13 illustrates an examplein which the through electrodes 17 are disposed in proximity toboundaries between adjacent photoelectric conversion regions 12 atrespective four corners in each of the photoelectric conversion regions12 and on straight lines connecting the four corners. In addition, in(D) of FIG. 13 , one of the readout electrodes 26 is disposed at amiddle position of every four pixels P3, and the one readout electrode26 is shared by the four pixels P3.

[Workings and Effects of Pixel P3]

The pixel P3 according to the present embodiment has the configurationdescribed above, which makes it possible to simultaneously obtain avisible light image and an infrared light image including distanceinformation at the same position in an in-plane direction. Furthermore,according to the pixel P3, as compared with a case where the pluralityof pixels P1 is included in the pixel section 100, it is possible toreduce a difference in infrared light detection sensitivity among aplurality of pixel groups PP3 included in the pixel section 100.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the respective on-chip lenses 54 in theZ-axis direction, which makes it possible to improve infrared lightdetection sensitivity in each pixel P2 It is to be noted that FIG. 13 isan example, and the arrangement positions of the through electrodes 17and the arrangement positions of the readout electrodes 26 in theplurality of pixels P3 arranged in the pixel section 100 of the presentdisclosure are not limited thereto.

In addition, even in a case where the plurality of pixels P3 accordingto the present embodiment is arranged, the central position of each ofthe opening portions 43K in the inter-pixel region light-shielding film43 may be shifted from the central position of a corresponding one ofthe pixels P3. one reason for this is to reduce variations in detectioncharacteristics of the plurality of pixels P3 arranged in the pixelsection 100, e.g., to prevent a decrease in detection sensitivity of thepixels P3 arranged in the peripheral portion of the pixel section 100.In this case, the shift amount of the central position of each of theopening portions 43K with respect to the central position of acorresponding one of the pixels P3 may be increased from the center ofthe pixel section 100 to the peripheral portion of the pixel section100. In particular, it is preferable that the shift amount benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100.

Furthermore, a spacing between adjacent pixels P3 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P2 arranged in the pixel section 100, for example.

4. Fourth Embodiment

[Configuration of Pixel P4]

FIG. 14 schematically illustrates an example of a cross-sectionalconfiguration in a pixel P4 as an imaging element according to a fourthembodiment. FIG. 15 is a schematic view of an example of an arrangementstate in an XY plane of a plurality of pixels P4. The pixel P4 isapplicable as the pixel P included in the pixel section 100 in thesolid-state imaging device 1 illustrated in FIG. 1 , as with the pixelP1 as the imaging element according to the first embodiment describedabove. However, in the present embodiment, as illustrated in FIGS. 14and 15 , one pixel P4 includes four sub-pixels SP4, and each of thesub-pixels SP4 includes one electric charge accumulation electrode 25and one photoelectric converter 10. Accordingly, in a case where thepixel P4 according to the present embodiment is used as the pixel Pillustrated in FIG. 1 , as an example, driving of the organicphotoelectric converter 20 including one electric charge accumulationelectrode 25 may be performed in the sub-pixel SP4 as a unit, anddriving of one photoelectric converter 10 may be performed in thesub-pixel SP4 as a unit.

(A) to (D) of FIG. 15 respectively illustrate arrangement states atheight positions corresponding to levels Lv1 to Lv3 and Lv5 in theZ-axis direction illustrated in FIG. 14 . That is, (A) of FIG. 15illustrates an arrangement state of the on-chip lenses 54 in the XYplane, (B) of FIG. 15 illustrates an arrangement state of the colorfilters 52 in the XY plane, (C) of FIG. 15 illustrates an arrangementstate of the electric charge accumulation electrodes 25 in the XY plane,and (D) of FIG. 15 illustrates an arrangement state of the photoelectricconversion regions 12 and the through electrodes 17 in the XY plane. Itis to be noted that in FIG. 15 , to secure visibility, the readoutelectrodes 26 are also illustrated in (D). In addition, in (B) of FIG.15 , a sign PR4 indicates the pixel P4 of red, a sign PG4 indicates thepixel P4 of green, and a sign PB4 indicates the pixel P4 of blue.

In the first embodiment described above, in the pixel section 100, oneon-chip lens 54, one color filter 52, one electric charge accumulationelectrode 25, and one photoelectric conversion region 12 are provided atpositions corresponding to each other in the Z-axis direction. Incontrast, in the present embodiment, one color filter 52, four electriccharge accumulation electrodes 25, and four photoelectric conversionregions 12 are provided, corresponding to one on-chip lens 54, atpositions corresponding to each other in the Z-axis direction. Morespecifically, the electric charge accumulation electrodes 25 and thephotoelectric conversion regions 12 are arranged, corresponding to oneon-chip lens 54 and one color filter 52, in two columns in the X-axisdirection and two rows in the Y-axis direction. That is, in the presentembodiment, as illustrated in FIGS. 15 and 16 , one pixel P4 includesfour electric charge accumulation electrodes 25 and four photoelectricconversion regions 12. The configuration of the pixel P4 issubstantially the same as the configuration of the pixel P1, except forthis point.

[Workings and Effects of Pixel P4]

The pixel P4 according to the present embodiment has the configurationdescribed above, which makes it possible to simultaneously obtain avisible light image and an infrared light image including distanceinformation at the same position in an in-plane direction. Furthermore,it is possible to obtain image plane phase difference information in theX-axis direction and the Y-axis direction by infrared light in eachpixel P4.

In addition, it is possible to obtain an infrared light signal at aposition corresponding to each of the red pixel PR4, the green pixelPG4, and the blue pixel PB4. Accordingly, in the pixel P4 according tothe present embodiment, an infrared light image having high resolutionis obtained, as compared with the pixel P2 according to the secondembodiment and the pixel P3 according to the third embodiment.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the on-chip lenses 54 in the Z-axisdirection, which makes it possible to improve infrared light detectionsensitivity in each pixel P4.

In addition, even in a case where the plurality of pixels P4 accordingto the present embodiment is arranged, the central position of each ofthe opening portions 43K in the inter-pixel region light-shielding film43 may be shifted from the central position of a corresponding one ofthe sub-pixels SP4. One reason for this is to reduce variations indetection characteristics of the plurality of pixels P4 arranged in thepixel section 100, e.g., to prevent a decrease in detection sensitivityof the pixels P4 arranged in the peripheral portion of the pixel section100. In this case, the shift amount of the central position of each ofthe opening portions 43K with respect to the central position of acorresponding one of the sub-pixels SP4 may be increased from the centerof the pixel section 100 to the peripheral portion of the pixel section100. In particular, it is preferable that the shift amount benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100.

Furthermore, a spacing between adjacent pixels P4 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P4 arranged in the pixel section 100, for example.

It is to be noted that FIG. 15 is an example, and the arrangementpositions of the through electrodes 17 and the arrangement positions ofthe readout electrodes 26 in the plurality of pixels P4 arranged in thepixel section 100 of the present disclosure are not limited thereto. Forexample, as illustrated in FIG. 16 , the through electrodes 17 may befurther disposed in proximity to boundaries between adjacentphotoelectric conversion regions 12 at midpoints of four corners in eachof the photoelectric conversion regions 12. FIG. 16 schematicallyillustrates a modification example of the arrangement state of theplurality of pixels P4 in the pixel section 100.

5. Fifth Embodiment

[Configuration of Pixel P5]

FIG. 17 schematically illustrates an example of a cross-sectionalconfiguration in a pixel P5 as an imaging element according to a fifthembodiment. FIG. 18 is a schematic view of an example of an arrangementstate in an XY plane of a plurality of pixels P5. The pixel P5 isapplicable as the pixel P included in the pixel section 100 in thesolid-state imaging device 1 illustrated in FIG. 1 , as with the pixelP1 as the imaging element according to the first embodiment describedabove. However, in the present embodiment, as illustrated in FIGS. 17and 18 , one pixel P5 includes four sub-pixels SP5, and each of thesub-pixels SP5 includes one electric charge accumulation electrode 25.Accordingly, in a case where the pixel P5 according to the presentembodiment is used as the pixel P illustrated in FIG. 1 , as an example,driving of the organic photoelectric converter 20 including one electriccharge accumulation electrode 25 may be performed in the sub-pixel SP5as a unit, and driving of one photoelectric converter 10 may beperformed in the pixel P5 as a unit.

(A) to (D) of FIG. 18 respectively illustrate arrangement states atheight positions corresponding to levels Lv1 to Lv3 and Lv5 in theZ-axis direction illustrated in FIG. 17 . That is, (A) of FIG. 18illustrates an arrangement state of the on-chip lenses 54 in the XYplane, (B) of FIG. 18 illustrates an arrangement state of the colorfilters 52 in the XY plane, (C) of FIG. 18 illustrates an arrangementstate of the electric charge accumulation electrodes 25 in the XY plane,and (D) of FIG. 18 illustrates an arrangement state of the photoelectricconversion regions 12 and the through electrodes 17 in the XY plane. Itis to be noted that in FIG. 18 , to secure visibility, the readoutelectrodes 26 are also illustrated in (D). In addition, in (B) of FIG.18 , a sign PR5 indicates the pixel P5 of red, a sign PG5 indicates thepixel P2 of green, and a sign PB2 indicates the pixel P2 of blue.

In the first embodiment described above, in the pixel section 100, oneon-chip lens 54, one color filter 52, one electric charge accumulationelectrode 25, and one photoelectric conversion region 12 are provided atpositions corresponding to each other in the Z-axis direction. Incontrast, in the present embodiment, one color filter 52, four electriccharge accumulation electrodes 25, and one photoelectric conversionregion 12 are provided, corresponding to one on-chip lens 54, atpositions corresponding to each other in the Z-axis direction. Morespecifically, the electric charge accumulation electrodes 25 arearranged, corresponding to one on-chip lens 54, one color filter 52, andone photoelectric conversion region 12, in two columns in the X-axisdirection and two rows in the Y-axis direction. That is, in the presentembodiment, as illustrated in FIGS. 17 and 18 , one pixel P5 includesfour electric charge accumulation electrodes 25. Furthermore, in thepixel P5 according to the present embodiment, an inter-pixel regionlight-shielding film 56 may be provided, for example, between theorganic photoelectric converter 20 and the on-chip lens 54 in the Z-axisdirection, more specifically, for example, between the color filter 52and the sealing film 51. The inter-pixel region light-shielding film 56includes a metal such as W (tungsten) and Al (aluminum) as a maincomponent. The inter-pixel region light-shielding film 56 includes aplurality of opening portions 56K, and is provided in boundary portionswith other adjacent pixels P5 in the XY plane, that is, regions betweencolor filters 52 of different colors to form a grid pattern as a whole.This makes it possible to suppress oblique incidence of unnecessarylight onto the organic photoelectric converters 20 of adjacent pixels P5and prevent color mixture. Furthermore, the inter-pixel regionlight-shielding film 56 is provided to surround the photoelectricconversion region 12 of each pixel P5 in plan view. This makes itpossible to suppress oblique incidence of unnecessary light onto thephotoelectric conversion regions 12 of adjacent pixels P5 and preventcolor mixture. In (B) of FIG. 18 , the inter-pixel regionlight-shielding film 56 is illustrated by a broken line. Theconfiguration of the pixel P5 is substantially the same as theconfiguration of the pixel P1, except for this point. In the presentembodiment, specifically an arrangement pitch of the color filters 52and an arrangement pitch of the photoelectric conversion regions 12coincide with each other; therefore, providing the inter-pixel regionlight-shielding film 56 makes it possible to expect a color mixtureprevention effect on both the organic photoelectric converters 20 andthe photoelectric conversion regions 12. Herein, the central position ofeach of the opening portions 56K in the inter-pixel regionlight-shielding film 43 may be shifted from the central position of acorresponding one of the pixels P5. One reason for this is to reducevariations in detection characteristics of the plurality of pixels P5arranged in the pixel section 100, e.g., to prevent a decrease indetection sensitivity of the pixels P5 arranged in the peripheralportion of the pixel section 100. In this case, the shift amount of thecentral position of each of the opening portions 56K with respect to thecentral position of a corresponding one of the pixels P5 may beincreased from the center of the pixel section 100 to the peripheralportion of the pixel section 100. In particular, the shift amount may benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. It is to be noted that theinter-pixel region light-shielding film 56 is appropriately applicableto any pixels described as respective embodiments and modificationexamples in the present specification, other than the pixel P5 accordingto the present embodiment. However, the inter-pixel regionlight-shielding film 56 may not be provided in the pixels described inthe embodiments and the modification examples.

[Workings and Effects of Pixel P5]

The pixel P5 according to the present embodiment has the configurationdescribed above, which makes it possible to simultaneously obtain avisible light image and an infrared light image including distanceinformation at the same position in an in-plane direction. Furthermore,it is possible to obtain image plane phase difference information in theX-axis direction and the Y-axis direction by visible light in each pixelP5.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the on-chip lenses 54 in the Z-axisdirection, which makes it possible to improve infrared light detectionsensitivity in each pixel P5.

In addition, even in a case where the plurality of pixels P5 accordingto the present embodiment is arranged, the central position of each ofthe opening portion 43K in the inter-pixel region light-shielding film43 may be shifted from the central position of a corresponding one ofthe pixels P5. One reason for this is to reduce variations in detectioncharacteristics of the plurality of pixels P5 arranged in the pixelsection 100, e.g., to prevent a decrease in detection sensitivity of thepixels P5 arranged in the peripheral portion of the pixel section 100.In this case, the shift amount of the central position of each of theopening portions 43K with respect to the central position of acorresponding one of the pixels P5 may be increased from the center ofthe pixel section 100 to the peripheral portion of the pixel section100. In particular, it is preferable that the shift amount benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100.

Furthermore, a spacing between adjacent pixels P5 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P5 arranged in the pixel section 100, for example.

It is to be noted that FIG. 18 is an example, and the arrangementpositions of the through electrodes 17 and the arrangement positions ofthe readout electrodes 26 in the plurality of pixels P4 arranged in thepixel section 100 of the present disclosure are not limited thereto. Forexample, as illustrated in FIG. 19 , the through electrodes 17 may befurther disposed in proximity to boundaries between adjacentphotoelectric conversion regions 12 at midpoints of four corners in eachof the photoelectric conversion regions 12. FIG. 19 schematicallyillustrates a first modification example of the arrangement state of theplurality of pixels P5 in the pixel section 100. Alternatively, asillustrated in FIG. 20 , the through electrodes 17 may be disposed inproximity to boundaries between adjacent photoelectric conversionregions 12 at both four corners in each of the photoelectric conversionregions 12 and midpoints of the four corners in each of thephotoelectric conversion regions 12. FIG. 20 schematically illustrates asecond modification example of the arrangement state of the plurality ofpixels P5 in the pixel section 100.

Furthermore, as illustrated in FIGS. 21A and 21B, in each pixel P5, forexample, the central position of the color filter 52 and the centralposition of the photoelectric conversion region 12 may be displaced by ahalf in both the X-axis direction and the Y-axis direction. Doing somakes it possible to reduce variations in light reception sensitivity toinfrared light in each photoelectric conversion region 12. It is to benoted that FIGS. 21A and 21B schematically illustrate a thirdmodification example of the arrangement state of the plurality of pixelsP5 in the pixel section 100. FIG. 21A specifically illustrates apositional relationship among the on-chip lenses 54, the photoelectricconversion regions 12, the through electrodes 17, and the readoutelectrodes 26. FIG. 21B specifically illustrates a positionalrelationship among the on-chip lenses 54, the color filters 52, and thephotoelectric conversion regions 12.

6. Sixth Embodiment

[Configuration of Pixel P6]

FIG. 22 schematically illustrates an example of a cross-sectionalconfiguration in a pixel P6 as an imaging element according to a sixthembodiment. FIG. 23 is a schematic view of an example of an arrangementstate in an XY plane of a plurality of pixels P6. The pixel P6 isapplicable as the pixel P included in the pixel section 100 in thesolid-state imaging device 1 illustrated in FIG. 1 , as with the pixelP1 as the imaging element according to the first embodiment describedabove. However, in the present embodiment, as illustrated in FIGS. 22and 23 , one pixel P6 includes four sub-pixels SP4, and each of thesub-pixels SP6 includes one electric charge accumulation electrode 25.In addition, four pixels P6 are included in one pixel group PP6, andshare one photoelectric converter 10. Accordingly, in a case where thepixel P6 according to the present embodiment is used as the pixel Pillustrated in FIG. 1 , as an example, driving of the organicphotoelectric converter 20 including one electric charge accumulationelectrode 25 may be performed in the sub-pixel SP6 as a unit, anddriving of one photoelectric converter 10 may be performed in the pixelgroup PP6 as a unit.

(A) to (D) of FIG. 23 respectively illustrate arrangement states atheight positions corresponding to levels Lv1 to Lv3 and Lv5 in theZ-axis direction illustrated in FIG. 22 . That is, (A) of FIG. 23illustrates an arrangement state of the on-chip lenses 54 in the XYplane, (B) of FIG. 23 illustrates an arrangement state of the colorfilters 52 in the XY plane, (C) of FIG. 23 illustrates an arrangementstate of the electric charge accumulation electrodes 25 in the XY plane,and (D) of FIG. 23 illustrates an arrangement state of the photoelectricconversion regions 12 and the through electrodes 17 in the XY plane. Itis to be noted that in FIG. 23 , to secure visibility, the readoutelectrodes 26 are also illustrated in (D). In addition, in (B) of FIG.23 , a sign PR6 indicates the pixel P6 of red, a sign PG6 indicates thepixel P6 of green, and a sign PB6 indicates the pixel P6 of blue.

In the first embodiment described above, in the pixel section 100, oneon-chip lens 54, one color filter 52, one electric charge accumulationelectrode 25, and one photoelectric conversion region 12 are provided atpositions corresponding to each other in the Z-axis direction. Incontrast, in the present embodiment, four on-chip lenses 54, four colorfilters 52, and sixteen electric charge accumulation electrodes 25 areprovided, corresponding to one photoelectric conversion region 12, atpositions corresponding to each other in the Z-axis direction. Morespecifically, the on-chip lenses 54 and the color filters 52 arearranged, corresponding to one photoelectric conversion region 12, intwo columns in the X-axis direction and two rows in the Y-axisdirection, and the electric charge accumulation electrodes 25 arearranged, corresponding to one photoelectric conversion region 12, infour columns in the X-axis direction and four rows in the Y-axisdirection. That is, in the present embodiment, as illustrated in FIGS.22 and 23 , four pixels P6 adjacent to each other in both the X-axisdirection and the Y-axis direction are included in one pixel group PP6,and share one photoelectric converter 10. The configuration of the pixelP6 is substantially the same as the configuration of the pixel P1,except for this point.

[Workings and Effects of Pixel P6]

The pixel P6 according to the present embodiment has the configurationdescribed above, which makes it possible to simultaneously obtain avisible light image and an infrared light image including distanceinformation at the same position in an in-plane direction. Furthermore,it is possible to obtain image plane phase difference information in theX-axis direction and the Y-axis direction by visible light in each pixelP6.

In addition, in the present embodiment, the through electrodes 17 andthe readout electrodes 26 are provided at positions not overlappingvicinities of the centers of the on-chip lenses 54 in the Z-axisdirection, which makes it possible to improve infrared light detectionsensitivity in each pixel P2.

In addition, even in a case where the plurality of pixels P6 accordingto the present embodiment is arranged, the central position of each ofthe opening portions 43K in the inter-pixel region light-shielding film43 may be shifted from the central position of a corresponding one ofthe pixels P5. One reason for this is to reduce variations in detectioncharacteristics of the plurality of pixels P6 arranged in the pixelsection 100, e.g., to prevent a decrease in detection sensitivity of thepixels P6 arranged in the peripheral portion of the pixel section 100.In this case, the shift amount of the central position of each of theopening portions 43K with respect to the central position of acorresponding one of the pixels P6 may be increased from the center ofthe pixel section 100 to the peripheral portion of the pixel section100. In particular, it is preferable that the shift amount benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100.

Furthermore, a spacing between adjacent pixels P6 may be increased fromthe center of the pixel section 100 to the peripheral portion of thepixel section 100. In particular, it is preferable that the spacing benonlinearly changed from the center of the pixel section 100 to theperipheral portion of the pixel section 100. Doing so makes it possibleto perform pupil correction in accordance with each image height in theplurality of pixels P6 arranged in the pixel section 100, for example.

It is to be noted that FIG. 23 is an example, and the arrangementpositions of the through electrodes 17 and the arrangement positions ofthe readout electrodes 26 in the plurality of pixels P6 arranged in thepixel section 100 of the present disclosure are not limited thereto. Forexample, as illustrated in FIG. 24 , the through electrodes 17 may bedisposed in proximity to boundaries between adjacent pixel groups PP6 tosurround each of the on-chip lenses 54. FIG. 24 schematicallyillustrates a modification example of the arrangement state of theplurality of pixels P6 in the pixel section 100.

7. Seventh Embodiment

[Configuration of Pixel P7]

FIG. 25 schematically illustrates an example of a cross-sectionalconfiguration in a pixel P7 as an imaging element according to a seventhembodiment. The pixel P7 is applicable as the pixel P included in thepixel section 100 in the solid-state imaging device 1 illustrated inFIG. 1 , as with the pixel P1 as the imaging element according to thefirst embodiment described above.

The pixel P7 according to the present embodiment further includes a pairof electric charge holding sections (MEMs) 143A and 143B on the frontsurface 11A of the semiconductor substrate 11, in addition to theconfiguration of the pixel P1. The MEMs 143A and 143B are regions whereelectric charges generated and accumulated in the photoelectricconversion region 12 are temporarily held to share the FDs 15A and 15Bwith other pixels. The configuration of the pixel P7 is substantiallythe same as the configuration of the pixel P1, except for this point. Itis to be noted that the MEMs 143A and 143B have a configuration in whichan insulating film and an electrode are stacked from the side of thefront surface 11A. In addition, a configuration or the like may beadopted in which floating diffusion layers of 15A and 15B are removed,the electric charge holding sections 143A and 143B are provided next tothe TGs 141A and 141B, and the FDs 15A and 15B are provided next to theelectric charge holding sections 143A and 143B. It is to be noted thatthe MEMs 143A and 143B are appropriately applicable to any pixelsdescribed as respective embodiments and modification examples in thepresent specification, other than the pixel P7 according to the presentembodiment.

[Workings and Effects of Pixel P7]

According to the pixel P7 according to the present embodiment, thephotoelectric converter 10 includes the MEMS 143A and 143B, which makesit possible to share the floating diffusion layers of 15A and 15B,thereby improving installation efficiency of the imaging element on thesemiconductor substrate. For example, increasing the area of anamplifier transistor makes it possible to improve noise characteristicsof a photoelectric conversion film. In addition, the pixel P7 hasworkings and effects similar to those of the pixel P1 according to thefirst embodiment described above.

8. Eighth Embodiment

FIG. 26 schematically illustrates an example of a cross-sectionalconfiguration of a pixel P8 as an imaging element according to an eighthembodiment. The pixel P8 is applicable as the pixel P included in thepixel section 100 in the solid-state imaging device 1 illustrated inFIG. 1 , as with the pixel P1 as the imaging element according to thefirst embodiment described above.

The pixel P8 according to the present embodiment further includes anoptical filter 61 on incident side of the on-chip lens 54, that is, onside opposite to the organic photoelectric converter 20 as viewed fromthe on-chip lens 54, in addition to the configuration of the pixel P1described in the first embodiment described above. Note that FIG. 26illustrates an example in which a plurality of color filters 52 ofcolors different from each other are arranged corresponding to oneoptical filter 61, one on-chip lens 54, one organic photoelectricconversion layer 22, one optical filter 42, and one photoelectricconversion region 12. For the sake of convenience, FIG. 26 illustrates acolor filter 52-1 and a color filter 52-2 of colors different from eachother. The configuration of the pixel P8 is substantially the same asthe configuration of the pixel P1, except for this point. It is to benoted that the pixel P8 is not limited to that illustrated in FIG. 26 .For example, one color filter 52 may be provided corresponding to oneoptical filter 61, or a plurality of on-chip lenses 54, a plurality oforganic photoelectric conversion layers 22, a plurality of opticalfilters 42, and a plurality of photoelectric conversion regions 12 maybe provided corresponding to one optical filter 61. It is to be notedthat the organic photoelectric conversion layer 22 may be providedcommon to some pixels P8, or may be provided common to all of aplurality of pixels P8 in the pixel section 100. Alternatively, oneoptical filter 61 may be provided over a plurality of pixels P8. It isto be noted that the optical filter 61 is applicable to any of thepixels P1 to P7 described in the first to seventh embodiments describedabove and the modification examples thereof.

FIGS. 27A to 27C respectively schematically illustrates wavelengthdependence of light transmittance of the optical filter 61, the colorfilter 52, and the optical filter 42 in the pixel P8. Specifically, FIG.27A illustrates a light transmittance distribution of the optical filter61, FIG. 27B illustrates a light transmittance distribution of the colorfilter 52, and FIG. 27C illustrates a light transmittance distributionof the optical filter 42. Furthermore, FIG. 27D illustrates each of arelationship between a wavelength incident on the organic photoelectricconversion layer 22 and sensitivity to incident light on the organicphotoelectric conversion layer 22, and a relationship between awavelength incident on the photoelectric conversion region 12 andsensitivity to incident light on the photoelectric conversion region 12.It is to be noted that in FIG. 27B, a light transmittance distributioncurve of the red color filter 52R is indicated by R, a lighttransmittance distribution curve of the green color filter 52G isindicated by G, and a light transmittance distribution curve of the bluecolor filter 52B is indicated by B. In addition, in FIG. 27C, the lighttransmittance distribution of the optical filter 61 is illustrated by abroken line, and the light transmittance distribution of the opticalfilter 42 is illustrated by a solid line. The optical filter 61 is aso-called dual bandpass filter, and is an optical member that has atransmission wavelength range in both the visible light range and theinfrared light range, and selectively allows visible light (e.g., lighthaving a wavelength of 400 nm to 650 nm both inclusive) and a portion ofinfrared light (e.g., light having a wavelength of 800 nm to 900 nm bothinclusive) to pass therethrough. Of incident light, the visible lightand the portion of the infrared light pass through the optical filter 61(FIG. 27A). Of light having passed through the optical filter 61,visible light in a blue region and the portion of infrared light passthrough the blue color filter 52B (FIG. 27B). In a case where theorganic photoelectric conversion layer 22 is configured to detect someor all of wavelengths in the visible light range and have no sensitivityto the infrared light range, of light having passed through the bluecolor filter 52B, the visible light in the blue region is absorbed bythe organic photoelectric conversion layer 22, and of the light havingpassed through the blue color filter 52B, the portion of the infraredlight passes through the organic photoelectric conversion layer 22. Oflight having passed through the organic photoelectric conversion layer22, the infrared light having passed through the optical filter 42 isincident on the photoelectric conversion region 12. The same applies tothe red color filter 52R and the green color filter 52G. As a result, asillustrated in FIG. 27D, visible light information (R, G, B) is obtainedin the organic photoelectric conversion layer 22, and infrared lightinformation (IR) is obtained in the photoelectric conversion region 12.As illustrated in FIGS. 27A to 27D, according to the pixel P8, onlyinfrared light in a predetermined wavelength range having passed throughall of the optical filter 61, the color filter 52, the organicphotoelectric conversion layer 22, and the optical filter 42 isselectively incident on the photoelectric conversion region 12, and isphotoelectrically converted.

It is to be noted that characteristics in FIGS. 27A to 27D are examples,and a light transmittance distribution of an optical filter applicableto the pixel P8 is not limited to those in FIGS. 27A to 27D. Forexample, like an optical filter 61A as a modification exampleillustrated in FIGS. 28A to 28D, an optical filter may be adopted thatselectively allows light in a continuous wavelength range from thevisible light range to a portion of the infrared light range to passtherethrough. Specifically, FIG. 28A illustrates a light transmittancedistribution of the optical filter 61A, FIG. 28B illustrates the lighttransmittance distribution of the color filter 52, and FIG. 28Cillustrates the light transmittance distribution of the optical filter42. Furthermore, FIG. 28D illustrates each of a relationship between awavelength incident on the organic photoelectric conversion layer 22 andsensitivity to incident light on the organic photoelectric conversionlayer 22 and a relationship between a wavelength incident on thephotoelectric conversion region 12 and sensitivity to incident light onthe photoelectric conversion region 12 in a case where the opticalfilter 61A is used.

9. Ninth Embodiment

FIG. 29 schematically illustrates an example of a cross-sectionalconfiguration of a pixel P9 as an imaging element according to a ninthembodiment. The pixel P9 is applicable as the pixel P included in thepixel section 100 in the solid-state imaging device 1 illustrated inFIG. 1 , as with the pixel P1 as the imaging element according to thefirst embodiment described above.

The pixel P9 according to the present embodiment further includes aninner lens INL between the organic photoelectric converter 20 and thephotoelectric converter 10, more specifically between the organicphotoelectric conversion layer 22 and the optical filter 42, in additionto the configuration of the pixel P8 described in the eighth embodimentdescribed above. The configuration of the pixel P9 is substantially thesame as the configuration of the pixel P8, except for this point. It isto be noted that the configuration in which the inner lens INL isprovided between the organic photoelectric conversion layer 22 and theoptical filter 42 is applicable to any of the pixels P1 to P7 describedin the first to seventh embodiments described above and the modificationexamples thereof.

In addition, like a pixel P9A illustrated in FIG. 30 , a light waveguideWG may be provided in place of the inner lens INL. FIG. 30 is aschematic view of a cross-sectional configuration of the pixel P9A as animaging element that is a modification example of the ninth embodiment.It is to be noted that the configuration in which the light waveguide WGis provided between the organic photoelectric conversion layer 22 andthe optical filter 42 is applicable to any of the pixels P1 to P7described in the first to seventh embodiments described above and themodification examples thereof.

FIG. 31 is a schematic view of an example of an arrangement state in anXY plane of a plurality of pixels P9 or P9A. (A) to (E) of FIG. 31respectively illustrate arrangement states at height positionscorresponding to levels Lv1 to Lv5 in the Z-axis direction illustratedin FIGS. 29 and 30 . That is, (A) of FIG. 31 illustrates an arrangementstate of the on-chip lenses 54 in the XY plane, (B) of FIG. 31illustrates an arrangement state of the color filters 52 in the XYplane, (C) of FIG. 31 illustrates an arrangement state of the electriccharge accumulation electrodes 25 in the XY plane, (D) of FIG. 13illustrates an arrangement state of the inner lenses INL or the lightwaveguides WG in the XY plane, and (E) of FIG. 31 illustrates anarrangement state of the photoelectric conversion regions 12 and thethrough electrodes 17 in the XY plane. In addition, in (B) of FIG. 31 ,signs PR9 and PR9A respectively indicate the pixels P9 and P9A of red,signs PG9 and PG9A respectively indicate the pixels P9 and P9A of green,and signs PB9 and PB9A respectively indicate the pixels P9 and P9A ofblue. It is to be noted that in (E) of FIG. 31 , the through electrodes17 are disposed in proximity to boundaries between adjacentphotoelectric conversion regions 12 at four corners in each of thephotoelectric conversion regions 12; however, the arrangement positionsof the through electrodes 17 are not limited thereto. For example, thethrough electrodes 17 may be disposed at midpoints of four corners ineach of the photoelectric conversion regions 12. Alternatively, thethrough electrodes 17 may be disposed in proximity to boundaries betweenadjacent photoelectric conversion regions 12 at both four corners ineach of the photoelectric conversion regions 12 and midpoints of thefour corners in each of the photoelectric conversion regions 12. Inaddition, (E) of FIG. 31 illustrates the inter-pixel regionlight-shielding film 43; however, the pixels P9 and P9A that are thepresent embodiment and the modification example thereof may not includethe inter-pixel region light-shielding film 43.

In the pixels P9 and 9A according to the present embodiment and themodification example thereof, the inner lens INL or the light waveguideWG is provided, which makes it possible to avoid even vignetting ofincident light oblique to the back surface 11B, which extends in the XYplane, in the inter-pixel region light-shielding wall 16, for example,and makes it possible to improve oblique incidence characteristics.

Furthermore, as illustrated in FIGS. 32A and 32B, in each pixel P9, forexample, the central position of the color filter 52 and the centralposition of the photoelectric conversion region 12 may be displaced by ahalf in both the X-axis direction and the Y-axis direction. On thisoccasion, it is preferable that the arrangement position of the innerlens INL also be shifted in accordance with the arrangement position ofthe photoelectric conversion region 12. Doing so makes it possible toreduce variations in light reception sensitivity to infrared light ineach photoelectric conversion region 12 and prevent color mixturebetween adjacent pixels P9. It is to be noted that FIGS. 32A and 32Bschematically illustrate a modification example of the arrangement stateof the plurality of pixels P9 in the pixel section 100. FIG. 32Aspecifically illustrates a positional relationship among the on-chiplenses 54, the photoelectric conversion regions 12, the throughelectrodes 17, and the readout electrodes 26. FIG. 32B specificallyillustrates a positional relationship among the on-chip lenses 54, thecolor filters 52, the inner lenses INL, and the photoelectric conversionregions 12. The same applies to the pixel 9A using the light waveguideWG in place of the inner lens INL. Furthermore, even in a case where theinner lens INL and the light waveguide WG are not used, as with formsillustrated in FIGS. 32A and 32B, the central position of the colorfilter 52 and the central position of the photoelectric conversionregion 12 may be displaced by a half in both the X-axis direction andthe Y-axis direction. It is to be noted that the arrangement positionsof the through electrodes 17 and the arrangement positions of thereadout electrodes 26 in the plurality of pixels P9 and P9A are notlimited to the arrangement positions illustrated in FIG. 31 and FIG.32A.

10. Tenth Embodiment

FIGS. 33A and 33B are respectively an enlarged vertical cross-sectionalview and an enlarged horizontal cross-sectional view of a vicinity ofthe through electrode 17 in an imaging element as a tenth embodiment. Itis to be noted that FIG. 33A illustrates a cross-section taken along acutting line A-A illustrated in FIG. 33B. A configuration according tothe present embodiment is applicable to any of the pixels P1 to P9 inthe first to ninth embodiments described above and the pixels as themodification examples thereof.

The present embodiment has a configuration in which, a metal layer 18 isprovided to surround the through electrode 17 in an XY cross section andextend in the Z-axis direction. The through electrode 17 and the metallayer 18 are electrically insulated from each other by an insulatinglayer Z1 that is provided to fill in a gap between the through electrode17 and the metal layer 18. The metal layer 18 may also serve as theinter-pixel region light-shielding wall 16, for example. The fixedelectric charge layer 13 is provided outside the metal layer 18 with theinsulating layer Z2 interposed therebetween.

The through electrode 17 is formed using, for example, tungsten (W) orthe like. In addition, the metal layer 18 is formed using, for example,tungsten (W). However, it is possible to use aluminum or the like forthe metal layer 18. The insulating layers Z1 and Z2 are formed using,for example, an insulating material such as SiOx (silicon oxide) andaluminum oxide. In addition, a gap between the inter-pixel regionlight-shielding wall 16 and the through electrode 17 may be provided inplace of the insulating layer Z1 to insulate the inter-pixel regionlight-shielding wall 16 and the through electrode 17 from each other.Likewise, a gap may be provided between the inter-pixel regionlight-shielding wall 16 and the fixed electric charge layer 13 in placeof the insulating layer Z2 to insulate the inter-pixel regionlight-shielding wall 16 and the fixed electric charge layer 13 from eachother. It is to be noted that constituent materials of respectivecomponents are not limited to those described above.

The through electrode 17 is, for example, a transmission path wheresignal electric charges generated in the organic photoelectric converter20 are transmitted and a voltage that drives the electric chargeaccumulation electrode 25 is transmitted. The metal layer 18 is aninter-pixel region light-shielding wall as well as an electrostaticshielding film. In a case where the metal layer 18 is not present, apositive voltage is applied to the through electrode 17 when the fixedelectric charge layer 13 has, for example, a negative fixed electriccharge, which may impair functions of the fixed electric charge layer13, thereby resulting in generation of a dark current. Accordingly, themetal layer 18 is provided to electrically shield the through electrode17 and the fixed electric charge layer 13, which makes it possible tosuppress such generation of the dark current. It is to be noted that itis possible to replace a portion, other than a portion surrounding thethrough electrode 17, of the metal layer 18 illustrated in FIG. 33B witha material having a light-shielding property and having non-electricconductivity. One reason for this is that the metal layer 18 of whichthe portion surrounding the through electrode 17 is formed using a metalmaterial such as tungsten and aluminum achieves effects of theelectrostatic shielding film described above. Furthermore, in a casewhere the metal layer 18 is provided as the electrostatic shieldingfilm, the portion, other than the portion surrounding the throughelectrode 17, of the metal layer 18 may not be provided.

In addition, the vicinity of the through electrode 17 may have aconfiguration illustrated in FIGS. 34A and 34B. The configurationillustrated in FIGS. 34A and 34B is the same as the configurationillustrated in FIGS. 33A and 33B, except that the fixed electric chargelayer 13 opposed to the metal layer 18 with the insulating layer Z2interposed therebetween is not included. The metal layer 18 is aninter-pixel region light-shielding wall, and shields an electric fieldof the through electrode to prevent a voltage to be applied to thethrough electrode 17 from affecting the semiconductor substrate 11.Furthermore, applying an appropriate voltage to the metal layer 18 makesit possible to achieve effects similar to the fixed electric chargelayer. Furthermore, it is possible to replace the portion, other thanthe portion surrounding the through electrode 17, of the metal layer 18illustrated in FIG. 34B with a material having a light-shieldingproperty and having non-electric conductivity. It is to be noted thateven in the configuration illustrated in FIGS. 34A and 34B, it ispreferable that the fixed electric charge layer 13 on the side of theback surface 11B of the semiconductor substrate 11 be provided.

It is to be noted that the configurations according to the presentembodiment illustrated in FIGS. 33A and 33B and FIGS. 34A and 34B, thatis, a configuration in which the metal layer 18 is provided to surroundthe through electrode 17 in the XY cross section and extend in theZ-axis direction is applicable to pixels other than the pixels describedin the first to ninth embodiments and the like described above. Forexample, the configuration is applicable to a pixel P10 as amodification example of the tenth embodiment illustrated in FIG. 35 .The pixel P10 includes the readout electrode 26 extending throughout thepixel P10, and does not include the semiconductor layer 21 and theelectric charge accumulation electrode 25. In addition, in the pixel P10in FIG. 35 , one TG 141, one FD 15, and the like are providedcorresponding to one photoelectric conversion region 12. Furthermore, asdescribed above, the metal layer 18 also serving as the inter-pixelregion light-shielding wall 16 is provided. The pixel P10 in FIG. 35 hassubstantially the same configuration as that of the pixel P1 illustratedin FIG. 2A and the like, except for this point. It is to be noted thatin FIG. 35 , the pixel P10 includes the color filter 52; however, thepixel P10 may not include the color filter 52. In addition, in the pixelP10, a wavelength range to which each of the organic photoelectricconverter 20 and the photoelectric converter 10 has sensitivity isfreely settable. Furthermore, the organic photoelectric conversion layer22 of the organic photoelectric converter 20 may include a photoelectricconversion material other than an organic matter, e.g., a quantum dot.

11. Eleventh Embodiment

FIG. 36A is a schematic view of an example of an entire configuration ofa photodetection system 201 according to an eleventh embodiment of thepresent disclosure. FIG. 36B is a schematic view of an example of acircuit configuration of the photodetection system 201. Thephotodetection system 201 includes a light-emitting device 210 as alight source section that emits infrared light L2, and a photodetector220 as a light-receiving section including a photoelectric conversionelement. As the photodetector 220, it is possible to use the solid-stateimaging device 1 described above. The photodetection system 201 mayfurther include a system controller 230, a light source driving section240, a sensor controller 250, a light source-side optical system 260,and a camera-side optical system 270.

The photodetector 220 is able to detect light L1 and light L2. The lightL1 is ambient light from outside reflected by a subject (a measurementobject) 200 (FIG. 36A). The light L2 is light emitted from thelight-emitting device 210 and then reflected by the subject 200. Thelight L1 is, for example, visible light, and the light L2 is, forexample, infrared light. The light L1 is detectable by an organicphotoelectric converter in the photodetector 220, and the light L2 isdetectable by a photoelectric converter in the photodetector 220. It ispossible to obtain image information of the subject 200 from the lightL1 and obtain distance information between the subject 200 and thephotodetection system 201 from the light L2. It is possible to mount thephotodetection system 201 on, for example, an electronic apparatus suchas a smartphone and a mobile body such as a car. It is possible toconfigure the light-emitting device 210 with, for example, asemiconductor laser, a surface-emitting semiconductor laser, or avertical cavity surface emitting laser (VCSEL). As a method of detectingthe light L2 emitted from the light-emitting device 210 by thephotodetector 220, for example, it is possible to adopt an iTOF method;however, the method is not limited thereto. In the iTOF method, thephotoelectric converter is able to measure a distance to the subject 200by time of flight (Time-of-Flight; TOF), for example. As a method ofdetecting the light L2 emitted from the light-emitting device 210 by thephotodetector 220, it is possible to adopt, for example, a structuredlight method or a stereovision method. For example, in the structuredlight method, light having a predetermined pattern is projected on thesubject 200, and distortion of the pattern is analyzed, thereby makingit possible to measure the distance between the photodetection system201 and the subject 200. In addition, in the stereovision method, forexample, two or more cameras are used to obtain two or more images ofthe subject 200 viewed from two or more different viewpoints, therebymaking it possible to measure the distance between the photodetectionsystem 201 and the subject 200. It is to be noted that it is possible tosynchronously control the light-emitting device 210 and thephotodetector 220 by the system controller 230.

12. Application Example to Electronic Apparatus

FIG. 37 is a block diagram illustrating a configuration example of anelectronic apparatus 2000 to which the present technology is applied.The electronic apparatus 2000 has a function as a camera, for example.

The electronic apparatus 2000 includes an optical section 2001 includinga lens group and the like, a photodetector 2002 to which the solid-stateimaging device 1 or the like described above (hereinafter referred to asthe solid-state imaging device 1 or the like) is applied, and a DSP(Digital Signal Processor) circuit 2003 that is a camera signalprocessing circuit. In addition, the electronic apparatus 2000 furtherincludes a frame memory 2004, a display section 2005, a recordingsection 2006, an operation section 2007, and a power supply section2008. The DSP circuit 2003, the frame memory 2004, the display section2005, the recording section 2006, the operation section 2007, and thepower supply section 2008 are coupled to one another through a bus line2009.

The optical section 2001 captures incident light (image light) from asubject and forms an image of the incident light on an imaging plane ofthe imaging device 2002. The imaging device 2002 converts the lightamount of the incident light of which the image is formed on the imagingplane by the optical section 2001 into an electric signal on apixel-by-pixel basis, and outputs the electric signal as a pixel signal.

The display section 2005 includes, for example, a panel type displaydevice such as a liquid crystal panel and an organic EL panel, anddisplays a moving image or a still image captured by the photodetector2002. The recording section 2006 records the moving image or the stillimage captured by the photodetector 2002 on a recording medium such as ahard disk or a semiconductor memory.

The operation section 2007 is operated by a user to issue operationinstructions for various functions of the electronic apparatus 2000. Thepower supply section 2008 supplies the DSP circuit 2003, the framememory 2004, the display section 2005, the recording section 2006, andthe operation section 2007 with various types of power as power foroperating these supply targets as appropriate.

As described above, use of the solid-state imaging device 1 or the likedescribed above as the photodetector 2002 makes it possible to expectobtainment of a favorable image.

13. Practical Application Example to In-Vivo Information AcquisitionSystem

The technology (present technology) according to the present disclosureis applicable to various products. For example, the technology accordingto the present disclosure may be applied to an endoscopic surgerysystem.

FIG. 38 is a block diagram depicting an example of a schematicconfiguration of an in-vivo information acquisition system of a patientusing a capsule type endoscope, to which the technology according to anembodiment of the present disclosure (present technology) can beapplied.

The in-vivo information acquisition system 10001 includes a capsule typeendoscope 10100 and an external controlling apparatus 10200.

The capsule type endoscope 10100 is swallowed by a patient at the timeof inspection. The capsule type endoscope 10100 has an image pickupfunction and a wireless communication function and successively picks upan image of the inside of an organ such as the stomach or an intestine(hereinafter referred to as in-vivo image) at predetermined intervalswhile it moves inside of the organ by peristaltic motion for a period oftime until it is naturally discharged from the patient. Then, thecapsule type endoscope 10100 successively transmits information of thein-vivo image to the external controlling apparatus 10200 outside thebody by wireless transmission.

The external controlling apparatus 10200 integrally controls operationof the in-vivo information acquisition system 10001. Further, theexternal controlling apparatus 10200 receives information of an in-vivoimage transmitted thereto from the capsule type endoscope 10100 andgenerates image data for displaying the in-vivo image on a displayapparatus (not depicted) on the basis of the received information of thein-vivo image.

In the in-vivo information acquisition system 10001, an in-vivo imageimaged a state of the inside of the body of a patient can be acquired atany time in this manner for a period of time until the capsule typeendoscope 10100 is discharged after it is swallowed.

A configuration and functions of the capsule type endoscope 10100 andthe external controlling apparatus 10200 are described in more detailbelow.

The capsule type endoscope 10100 includes a housing 10101 of the capsuletype, in which a light source unit 10111, an image pickup unit 10112, animage processing unit 10113, a wireless communication unit 10114, apower feeding unit 10115, a power supply unit 10116 and a control unit10117 are accommodated.

The light source unit 10111 includes a light source such as, forexample, a light emitting diode (LED) and irradiates light on an imagepickup field-of-view of the image pickup unit 10112.

The image pickup unit 10112 includes an image pickup element and anoptical system including a plurality of lenses provided at a precedingstage to the image pickup element. Reflected light (hereinafter referredto as observation light) of light irradiated on a body tissue which isan observation target is condensed by the optical system and introducedinto the image pickup element. In the image pickup unit 10112, theincident observation light is photoelectrically converted by the imagepickup element, by which an image signal corresponding to theobservation light is generated. The image signal generated by the imagepickup unit 10112 is provided to the image processing unit 10113.

The image processing unit 10113 includes a processor such as a centralprocessing unit (CPU) or a graphics processing unit (GPU) and performsvarious signal processes for an image signal generated by the imagepickup unit 10112. The image processing unit 10113 provides the imagesignal for which the signal processes have been performed thereby as RAWdata to the wireless communication unit 10114.

The wireless communication unit 10114 performs a predetermined processsuch as a modulation process for the image signal for which the signalprocesses have been performed by the image processing unit 10113 andtransmits the resulting image signal to the external controllingapparatus 10200 through an antenna 10114A. Further, the wirelesscommunication unit 10114 receives a control signal relating to drivingcontrol of the capsule type endoscope 10100 from the externalcontrolling apparatus 10200 through the antenna 10114A. The wirelesscommunication unit 10114 provides the control signal received from theexternal controlling apparatus 10200 to the control unit 10117.

The power feeding unit 10115 includes an antenna coil for powerreception, a power regeneration circuit for regenerating electric powerfrom current generated in the antenna coil, a voltage booster circuitand so forth. The power feeding unit 10115 generates electric powerusing the principle of non-contact charging.

The power supply unit 10116 includes a secondary battery and storeselectric power generated by the power feeding unit 10115. In FIG. 38 ,in order to avoid complicated illustration, an arrow mark indicative ofa supply destination of electric power from the power supply unit 10116and so forth are omitted. However, electric power stored in the powersupply unit 10116 is supplied to and can be used to drive the lightsource unit 10111, the image pickup unit 10112, the image processingunit 10113, the wireless communication unit 10114 and the control unit10117.

The control unit 10117 includes a processor such as a CPU and suitablycontrols driving of the light source unit 10111, the image pickup unit10112, the image processing unit 10113, the wireless communication unit10114 and the power feeding unit 10115 in accordance with a controlsignal transmitted thereto from the external controlling apparatus10200.

The external controlling apparatus 10200 includes a processor such as aCPU or a GPU, a microcomputer, a control board or the like in which aprocessor and a storage element such as a memory are mixedlyincorporated. The external controlling apparatus 10200 transmits acontrol signal to the control unit 10117 of the capsule type endoscope10100 through an antenna 10200A to control operation of the capsule typeendoscope 10100. In the capsule type endoscope 10100, an irradiationcondition of light upon an observation target of the light source unit10111 can be changed, for example, in accordance with a control signalfrom the external controlling apparatus 10200. Further, an image pickupcondition (for example, a frame rate, an exposure value or the like ofthe image pickup unit 10112) can be changed in accordance with a controlsignal from the external controlling apparatus 10200. Further, thesubstance of processing by the image processing unit 10113 or acondition for transmitting an image signal from the wirelesscommunication unit 10114 (for example, a transmission interval, atransmission image number or the like) may be changed in accordance witha control signal from the external controlling apparatus 10200.

Further, the external controlling apparatus 10200 performs various imageprocesses for an image signal transmitted thereto from the capsule typeendoscope 10100 to generate image data for displaying a picked upin-vivo image on the display apparatus. As the image processes, varioussignal processes can be performed such as, for example, a developmentprocess (demosaic process), an image quality improving process(bandwidth enhancement process, a super-resolution process, a noisereduction (NR) process and/or image stabilization process) and/or anenlargement process (electronic zooming process). The externalcontrolling apparatus 10200 controls driving of the display apparatus tocause the display apparatus to display a picked up in-vivo image on thebasis of generated image data. Alternatively, the external controllingapparatus 10200 may also control a recording apparatus (not depicted) torecord generated image data or control a printing apparatus (notdepicted) to output generated image data by printing.

One example of the in-vivo information acquisition system to which thetechnology according to the present disclosure may be applied has beendescribed above. The technology according to the present disclosure isapplicable to, for example, the image pickup unit 10112 among theconfigurations described above. This makes it possible to achieve highimage detection accuracy in spite of a small size.

14. Practical Application Example to Endoscopic Surgery System

The technology (present technology) according to the present disclosureis applicable to various products. For example, the technology accordingto the present disclosure may be applied to an endoscopic surgerysystem.

FIG. 39 is a view depicting an example of a schematic configuration ofan endoscopic surgery system to which the technology according to anembodiment of the present disclosure (present technology) can beapplied.

In FIG. 39 , a state is illustrated in which a surgeon (medical doctor)11131 is using an endoscopic surgery system 11000 to perform surgery fora patient 11132 on a patient bed 11133. As depicted, the endoscopicsurgery system 11000 includes an endoscope 11100, other surgical tools11110 such as a pneumoperitoneum tube 11111 and an energy device 11112,a supporting arm apparatus 11120 which supports the endoscope 11100thereon, and a cart 11200 on which various apparatus for endoscopicsurgery are mounted.

The endoscope 11100 includes a lens barrel 11101 having a region of apredetermined length from a distal end thereof to be inserted into abody cavity of the patient 11132, and a camera head 11102 connected to aproximal end of the lens barrel 11101. In the example depicted, theendoscope 11100 is depicted which includes as a rigid endoscope havingthe lens barrel 11101 of the hard type. However, the endoscope 11100 mayotherwise be included as a flexible endoscope having the lens barrel11101 of the flexible type.

The lens barrel 11101 has, at a distal end thereof, an opening in whichan objective lens is fitted. A light source apparatus 11203 is connectedto the endoscope 11100 such that light generated by the light sourceapparatus 11203 is introduced to a distal end of the lens barrel 11101by a light guide extending in the inside of the lens barrel 11101 and isirradiated toward an observation target in a body cavity of the patient11132 through the objective lens. It is to be noted that the endoscope11100 may be a forward-viewing endoscope or may be an oblique-viewingendoscope or a side-viewing endoscope.

An optical system and an image pickup element are provided in the insideof the camera head 11102 such that reflected light (observation light)from the observation target is condensed on the image pickup element bythe optical system. The observation light is photoelectrically convertedby the image pickup element to generate an electric signal correspondingto the observation light, namely, an image signal corresponding to anobservation image. The image signal is transmitted as RAW data to a CCU11201.

The CCU 11201 includes a central processing unit (CPU), a graphicsprocessing unit (GPU) or the like and integrally controls operation ofthe endoscope 11100 and a display apparatus 11202. Further, the CCU11201 receives an image signal from the camera head 11102 and performs,for the image signal, various image processes for displaying an imagebased on the image signal such as, for example, a development process(demosaic process).

The display apparatus 11202 displays thereon an image based on an imagesignal, for which the image processes have been performed by the CCU11201, under the control of the CCU 11201.

The light source apparatus 11203 includes a light source such as, forexample, a light emitting diode (LED) and supplies irradiation lightupon imaging of a surgical region to the endoscope 11100.

An inputting apparatus 11204 is an input interface for the endoscopicsurgery system 11000. A user can perform inputting of various kinds ofinformation or instruction inputting to the endoscopic surgery system11000 through the inputting apparatus 11204. For example, the user wouldinput an instruction or a like to change an image pickup condition (typeof irradiation light, magnification, focal distance or the like) by theendoscope 11100.

A treatment tool controlling apparatus 11205 controls driving of theenergy device 11112 for cautery or incision of a tissue, sealing of ablood vessel or the like. A pneumoperitoneum apparatus 11206 feeds gasinto a body cavity of the patient 11132 through the pneumoperitoneumtube 11111 to inflate the body cavity in order to secure the field ofview of the endoscope 11100 and secure the working space for thesurgeon. A recorder 11207 is an apparatus capable of recording variouskinds of information relating to surgery. A printer 11208 is anapparatus capable of printing various kinds of information relating tosurgery in various forms such as a text, an image or a graph.

It is to be noted that the light source apparatus 11203 which suppliesirradiation light when a surgical region is to be imaged to theendoscope 11100 may include a white light source which includes, forexample, an LED, a laser light source or a combination of them. Where awhite light source includes a combination of red, green, and blue (RGB)laser light sources, since the output intensity and the output timingcan be controlled with a high degree of accuracy for each color (eachwavelength), adjustment of the white balance of a picked up image can beperformed by the light source apparatus 11203. Further, in this case, iflaser beams from the respective RGB laser light sources are irradiatedtime-divisionally on an observation target and driving of the imagepickup elements of the camera head 11102 are controlled in synchronismwith the irradiation timings. Then images individually corresponding tothe R, G and B colors can be also picked up time-divisionally. Accordingto this method, a color image can be obtained even if color filters arenot provided for the image pickup element.

Further, the light source apparatus 11203 may be controlled such thatthe intensity of light to be outputted is changed for each predeterminedtime. By controlling driving of the image pickup element of the camerahead 11102 in synchronism with the timing of the change of the intensityof light to acquire images time-divisionally and synthesizing theimages, an image of a high dynamic range free from underexposed blockedup shadows and overexposed highlights can be created.

Further, the light source apparatus 11203 may be configured to supplylight of a predetermined wavelength band ready for special lightobservation. In special light observation, for example, by utilizing thewavelength dependency of absorption of light in a body tissue toirradiate light of a narrow band in comparison with irradiation lightupon ordinary observation (namely, white light), narrow band observation(narrow band imaging) of imaging a predetermined tissue such as a bloodvessel of a superficial portion of the mucous membrane or the like in ahigh contrast is performed. Alternatively, in special light observation,fluorescent observation for obtaining an image from fluorescent lightgenerated by irradiation of excitation light may be performed. Influorescent observation, it is possible to perform observation offluorescent light from a body tissue by irradiating excitation light onthe body tissue (autofluorescence observation) or to obtain afluorescent light image by locally injecting a reagent such asindocyanine green (ICG) into a body tissue and irradiating excitationlight corresponding to a fluorescent light wavelength of the reagentupon the body tissue. The light source apparatus 11203 can be configuredto supply such narrow-band light and/or excitation light suitable forspecial light observation as described above.

FIG. 40 is a block diagram depicting an example of a functionalconfiguration of the camera head 11102 and the CCU 11201 depicted inFIG. 39 .

The camera head 11102 includes a lens unit 11401, an image pickup unit11402, a driving unit 11403, a communication unit 11404 and a camerahead controlling unit 11405. The CCU 11201 includes a communication unit11411, an image processing unit 11412 and a control unit 11413. Thecamera head 11102 and the CCU 11201 are connected for communication toeach other by a transmission cable 11400.

The lens unit 11401 is an optical system, provided at a connectinglocation to the lens barrel 11101. Observation light taken in from adistal end of the lens barrel 11101 is guided to the camera head 11102and introduced into the lens unit 11401. The lens unit 11401 includes acombination of a plurality of lenses including a zoom lens and afocusing lens.

The number of image pickup elements which is included by the imagepickup unit 11402 may be one (single-plate type) or a plural number(multi-plate type). Where the image pickup unit 11402 is configured asthat of the multi-plate type, for example, image signals correspondingto respective R, G and B are generated by the image pickup elements, andthe image signals may be synthesized to obtain a color image. The imagepickup unit 11402 may also be configured so as to have a pair of imagepickup elements for acquiring respective image signals for the right eyeand the left eye ready for three dimensional (3D) display. If 3D displayis performed, then the depth of a living body tissue in a surgicalregion can be comprehended more accurately by the surgeon 11131. It isto be noted that, where the image pickup unit 11402 is configured asthat of stereoscopic type, a plurality of systems of lens units 11401are provided corresponding to the individual image pickup elements.

Further, the image pickup unit 11402 may not necessarily be provided onthe camera head 11102. For example, the image pickup unit 11402 may beprovided immediately behind the objective lens in the inside of the lensbarrel 11101.

The driving unit 11403 includes an actuator and moves the zoom lens andthe focusing lens of the lens unit 11401 by a predetermined distancealong an optical axis under the control of the camera head controllingunit 11405. Consequently, the magnification and the focal point of apicked up image by the image pickup unit 11402 can be adjusted suitably.

The communication unit 11404 includes a communication apparatus fortransmitting and receiving various kinds of information to and from theCCU 11201. The communication unit 11404 transmits an image signalacquired from the image pickup unit 11402 as RAW data to the CCU 11201through the transmission cable 11400.

In addition, the communication unit 11404 receives a control signal forcontrolling driving of the camera head 11102 from the CCU 11201 andsupplies the control signal to the camera head controlling unit 11405.The control signal includes information relating to image pickupconditions such as, for example, information that a frame rate of apicked up image is designated, information that an exposure value uponimage picking up is designated and/or information that a magnificationand a focal point of a picked up image are designated.

It is to be noted that the image pickup conditions such as the framerate, exposure value, magnification or focal point may be designated bythe user or may be set automatically by the control unit 11413 of theCCU 11201 on the basis of an acquired image signal. In the latter case,an auto exposure (AE) function, an auto focus (AF) function and an autowhite balance (AWB) function are incorporated in the endoscope 11100.

The camera head controlling unit 11405 controls driving of the camerahead 11102 on the basis of a control signal from the CCU 11201 receivedthrough the communication unit 11404.

The communication unit 11411 includes a communication apparatus fortransmitting and receiving various kinds of information to and from thecamera head 11102. The communication unit 11411 receives an image signaltransmitted thereto from the camera head 11102 through the transmissioncable 11400.

Further, the communication unit 11411 transmits a control signal forcontrolling driving of the camera head 11102 to the camera head 11102.The image signal and the control signal can be transmitted by electricalcommunication, optical communication or the like.

The image processing unit 11412 performs various image processes for animage signal in the form of RAW data transmitted thereto from the camerahead 11102.

The control unit 11413 performs various kinds of control relating toimage picking up of a surgical region or the like by the endoscope 11100and display of a picked up image obtained by image picking up of thesurgical region or the like. For example, the control unit 11413 createsa control signal for controlling driving of the camera head 11102.

Further, the control unit 11413 controls, on the basis of an imagesignal for which image processes have been performed by the imageprocessing unit 11412, the display apparatus 11202 to display a pickedup image in which the surgical region or the like is imaged. Thereupon,the control unit 11413 may recognize various objects in the picked upimage using various image recognition technologies. For example, thecontrol unit 11413 can recognize a surgical tool such as forceps, aparticular living body region, bleeding, mist when the energy device11112 is used and so forth by detecting the shape, color and so forth ofedges of objects included in a picked up image. The control unit 11413may cause, when it controls the display apparatus 11202 to display apicked up image, various kinds of surgery supporting information to bedisplayed in an overlapping manner with an image of the surgical regionusing a result of the recognition. Where surgery supporting informationis displayed in an overlapping manner and presented to the surgeon11131, the burden on the surgeon 11131 can be reduced and the surgeon11131 can proceed with the surgery with certainty.

The transmission cable 11400 which connects the camera head 11102 andthe CCU 11201 to each other is an electric signal cable ready forcommunication of an electric signal, an optical fiber ready for opticalcommunication or a composite cable ready for both of electrical andoptical communications.

Here, while, in the example depicted, communication is performed bywired communication using the transmission cable 11400, thecommunication between the camera head 11102 and the CCU 11201 may beperformed by wireless communication.

One example of the endoscopic surgery system to which the technologyaccording to the present disclosure may be applied has been describedabove. The technology according to the present disclosure is applicableto, for example, the image pickup unit 11402 of the camera head 11102among the configurations described above. Applying the technologyaccording to the present disclosure to the image pickup unit 11402 makesit possible to obtain a clearer image of the surgical region, therebyimproving viewability of the surgical region for a surgeon.

It is to be noted that the endoscopic surgery system has been describedhere as an example, but the technology according to the presentdisclosure may be additionally applied to, for example, a microscopicsurgery system and the like.

15. Practical Application Example to Mobile Body

The technology (present technology) according to the present disclosureis applicable to various products. For example, the technology accordingto the present disclosure may be achieved in the form of an apparatus tobe mounted to a mobile body of any kind such as an automobile, anelectric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, apersonal mobility, an airplane, a drone, a vessel, and a robot.

FIG. 41 is a block diagram depicting an example of schematicconfiguration of a vehicle control system as an example of a mobile bodycontrol system to which the technology according to an embodiment of thepresent disclosure can be applied.

The vehicle control system 12000 includes a plurality of electroniccontrol units connected to each other via a communication network 12001.In the example depicted in FIG. 41 , the vehicle control system 12000includes a driving system control unit 12010, a body system control unit12020, an outside-vehicle information detecting unit 12030, anin-vehicle information detecting unit 12040, and an integrated controlunit 12050. In addition, a microcomputer 12051, a sound/image outputsection 12052, and a vehicle-mounted network interface (I/F) 12053 areillustrated as a functional configuration of the integrated control unit12050.

The driving system control unit 12010 controls the operation of devicesrelated to the driving system of the vehicle in accordance with variouskinds of programs. For example, the driving system control unit 12010functions as a control device for a driving force generating device forgenerating the driving force of the vehicle, such as an internalcombustion engine, a driving motor, or the like, a driving forcetransmitting mechanism for transmitting the driving force to wheels, asteering mechanism for adjusting the steering angle of the vehicle, abraking device for generating the braking force of the vehicle, and thelike.

The body system control unit 12020 controls the operation of variouskinds of devices provided to a vehicle body in accordance with variouskinds of programs. For example, the body system control unit 12020functions as a control device for a keyless entry system, a smart keysystem, a power window device, or various kinds of lamps such as aheadlamp, a backup lamp, a brake lamp, a turn signal, a fog lamp, or thelike. In this case, radio waves transmitted from a mobile device as analternative to a key or signals of various kinds of switches can beinput to the body system control unit 12020. The body system controlunit 12020 receives these input radio waves or signals, and controls adoor lock device, the power window device, the lamps, or the like of thevehicle.

The outside-vehicle information detecting unit 12030 detects informationabout the outside of the vehicle including the vehicle control system12000. For example, the outside-vehicle information detecting unit 12030is connected with an imaging section 12031. The outside-vehicleinformation detecting unit 12030 makes the imaging section 12031 imagean image of the outside of the vehicle, and receives the imaged image.On the basis of the received image, the outside-vehicle informationdetecting unit 12030 may perform processing of detecting an object suchas a human, a vehicle, an obstacle, a sign, a character on a roadsurface, or the like, or processing of detecting a distance thereto.

The imaging section 12031 is an optical sensor that receives light, andwhich outputs an electric signal corresponding to a received lightamount of the light. The imaging section 12031 can output the electricsignal as an image, or can output the electric signal as informationabout a measured distance. In addition, the light received by theimaging section 12031 may be visible light, or may be invisible lightsuch as infrared rays or the like.

The in-vehicle information detecting unit 12040 detects informationabout the inside of the vehicle. The in-vehicle information detectingunit 12040 is, for example, connected with a driver state detectingsection 12041 that detects the state of a driver. The driver statedetecting section 12041, for example, includes a camera that images thedriver. On the basis of detection information input from the driverstate detecting section 12041, the in-vehicle information detecting unit12040 may calculate a degree of fatigue of the driver or a degree ofconcentration of the driver, or may determine whether the driver isdozing.

The microcomputer 12051 can calculate a control target value for thedriving force generating device, the steering mechanism, or the brakingdevice on the basis of the information about the inside or outside ofthe vehicle which information is obtained by the outside-vehicleinformation detecting unit 12030 or the in-vehicle information detectingunit 12040, and output a control command to the driving system controlunit 12010. For example, the microcomputer 12051 can perform cooperativecontrol intended to implement functions of an advanced driver assistancesystem (ADAS) which functions include collision avoidance or shockmitigation for the vehicle, following driving based on a followingdistance, vehicle speed maintaining driving, a warning of collision ofthe vehicle, a warning of deviation of the vehicle from a lane, or thelike.

In addition, the microcomputer 12051 can perform cooperative controlintended for automatic driving, which makes the vehicle to travelautonomously without depending on the operation of the driver, or thelike, by controlling the driving force generating device, the steeringmechanism, the braking device, or the like on the basis of theinformation about the outside or inside of the vehicle which informationis obtained by the outside-vehicle information detecting unit 12030 orthe in-vehicle information detecting unit 12040.

In addition, the microcomputer 12051 can output a control command to thebody system control unit 12020 on the basis of the information about theoutside of the vehicle which information is obtained by theoutside-vehicle information detecting unit 12030. For example, themicrocomputer 12051 can perform cooperative control intended to preventa glare by controlling the headlamp so as to change from a high beam toa low beam, for example, in accordance with the position of a precedingvehicle or an oncoming vehicle detected by the outside-vehicleinformation detecting unit 12030.

The sound/image output section 12052 transmits an output signal of atleast one of a sound and an image to an output device capable ofvisually or auditorily notifying information to an occupant of thevehicle or the outside of the vehicle. In the example of FIG. 41 , anaudio speaker 12061, a display section 12062, and an instrument panel12063 are illustrated as the output device. The display section 12062may, for example, include at least one of an on-board display and ahead-up display.

FIG. 42 is a diagram depicting an example of the installation positionof the imaging section 12031.

In FIG. 42 , the imaging section 12031 includes imaging sections 12101,12102, 12103, 12104, and 12105.

The imaging sections 12101, 12102, 12103, 12104, and 12105 are, forexample, disposed at positions on a front nose, sideview mirrors, a rearbumper, and a back door of the vehicle 12100 as well as a position on anupper portion of a windshield within the interior of the vehicle. Theimaging section 12101 provided to the front nose and the imaging section12105 provided to the upper portion of the windshield within theinterior of the vehicle obtain mainly an image of the front of thevehicle 12100. The imaging sections 12102 and 12103 provided to thesideview mirrors obtain mainly an image of the sides of the vehicle12100. The imaging section 12104 provided to the rear bumper or the backdoor obtains mainly an image of the rear of the vehicle 12100. Theimaging section 12105 provided to the upper portion of the windshieldwithin the interior of the vehicle is used mainly to detect a precedingvehicle, a pedestrian, an obstacle, a signal, a traffic sign, a lane, orthe like.

Incidentally, FIG. 42 depicts an example of photographing ranges of theimaging sections 12101 to 12104. An imaging range 12111 represents theimaging range of the imaging section 12101 provided to the front nose.Imaging ranges 12112 and 12113 respectively represent the imaging rangesof the imaging sections 12102 and 12103 provided to the sideviewmirrors. An imaging range 12114 represents the imaging range of theimaging section 12104 provided to the rear bumper or the back door. Abird's-eye image of the vehicle 12100 as viewed from above is obtainedby superimposing image data imaged by the imaging sections 12101 to12104, for example.

At least one of the imaging sections 12101 to 12104 may have a functionof obtaining distance information. For example, at least one of theimaging sections 12101 to 12104 may be a stereo camera constituted of aplurality of imaging elements, or may be an imaging element havingpixels for phase difference detection.

For example, the microcomputer 12051 can determine a distance to eachthree-dimensional object within the imaging ranges 12111 to 12114 and atemporal change in the distance (relative speed with respect to thevehicle 12100) on the basis of the distance information obtained fromthe imaging sections 12101 to 12104, and thereby extract, as a precedingvehicle, a nearest three-dimensional object in particular that ispresent on a traveling path of the vehicle 12100 and which travels insubstantially the same direction as the vehicle 12100 at a predeterminedspeed (for example, equal to or more than 0 km/hour). Further, themicrocomputer 12051 can set a following distance to be maintained infront of a preceding vehicle in advance, and perform automatic brakecontrol (including following stop control), automatic accelerationcontrol (including following start control), or the like. It is thuspossible to perform cooperative control intended for automatic drivingthat makes the vehicle travel autonomously without depending on theoperation of the driver or the like.

For example, the microcomputer 12051 can classify three-dimensionalobject data on three-dimensional objects into three-dimensional objectdata of a two-wheeled vehicle, a standard-sized vehicle, a large-sizedvehicle, a pedestrian, a utility pole, and other three-dimensionalobjects on the basis of the distance information obtained from theimaging sections 12101 to 12104, extract the classifiedthree-dimensional object data, and use the extracted three-dimensionalobject data for automatic avoidance of an obstacle. For example, themicrocomputer 12051 identifies obstacles around the vehicle 12100 asobstacles that the driver of the vehicle 12100 can recognize visuallyand obstacles that are difficult for the driver of the vehicle 12100 torecognize visually. Then, the microcomputer 12051 determines a collisionrisk indicating a risk of collision with each obstacle. In a situationin which the collision risk is equal to or higher than a set value andthere is thus a possibility of collision, the microcomputer 12051outputs a warning to the driver via the audio speaker 12061 or thedisplay section 12062, and performs forced deceleration or avoidancesteering via the driving system control unit 12010. The microcomputer12051 can thereby assist in driving to avoid collision.

At least one of the imaging sections 12101 to 12104 may be an infraredcamera that detects infrared rays. The microcomputer 12051 can, forexample, recognize a pedestrian by determining whether or not there is apedestrian in imaged images of the imaging sections 12101 to 12104. Suchrecognition of a pedestrian is, for example, performed by a procedure ofextracting characteristic points in the imaged images of the imagingsections 12101 to 12104 as infrared cameras and a procedure ofdetermining whether or not it is the pedestrian by performing patternmatching processing on a series of characteristic points representingthe contour of the object. When the microcomputer 12051 determines thatthere is a pedestrian in the imaged images of the imaging sections 12101to 12104, and thus recognizes the pedestrian, the sound/image outputsection 12052 controls the display section 12062 so that a squarecontour line for emphasis is displayed so as to be superimposed on therecognized pedestrian. The sound/image output section 12052 may alsocontrol the display section 12062 so that an icon or the likerepresenting the pedestrian is displayed at a desired position.

One example of the vehicle control system to which the technologyaccording to the present disclosure may be applied has been describedabove. The technology according to the present disclosure is applicableto the imaging section 12031 among the configurations described above.Applying the technology according to the present disclosure to theimaging section 12031 makes it possible to obtain a shot image that iseasier to see. This makes it possible to decrease the fatigue of thedriver.

16. Other Modification Examples

The present disclosure has been described above with reference to someembodiments and the modification examples, as well as applicationexamples thereof or practical application examples thereof (hereinafterreferred to as “embodiments and the like”), but the present disclosureare not limited to the embodiments and the like described above, and maybe modified in a variety of ways. For example, the present disclosure isnot limited to a back-illuminated image sensor, and is also applicableto a front-illuminated image sensor.

In addition, the imaging device of the present disclosure may have aform of a module in which an imaging section and a signal processor oran optical system are integrally packaged.

Furthermore, in the embodiments and the like described above, thesolid-state imaging device in which the light amount of incident lightof which an image is formed on an imaging plane through an optical lenssystem is converted into an electric signal on a pixel-by-pixel basisand the electric signal is outputted as a pixel signal, and the imagingelement mounted to the solid-state imaging device have been described asexamples; however, the photoelectric conversion element of the presentdisclosure is not limited to such an imaging element. For example, it issufficient if the photoelectric conversion element detects and receiveslight from an subject, and generates electric charges corresponding tothe amount of received light by photoelectric conversion and accumulatesthe electric charges. The signal to be outputted may be a signal ofimage information or a signal of distance measurement information.

In addition, in the embodiments and the like described above, a casewhere the photoelectric converter 10 as a second photoelectric converteris an iTOF sensor is described as an example; however, the presentdisclosure is not limited thereto. That is, the second photoelectricconverter is not limited to a photoelectric converter that detects lighthaving a wavelength in the infrared light range, and may be aphotoelectric converter that detects light having a wavelength inanother wavelength range. In addition, in a case where the photoelectricconverter 10 is not an iTOF sensor, only one transfer transistor (TG)may be provided.

Furthermore, in the embodiments and the like described above, theimaging element in which the photoelectric converter 10 including thephotoelectric conversion region 12 and the organic photoelectricconverter 20 including the organic photoelectric conversion layer 22 arestacked with the intermediate layer 40 interposed therebetween isdescribed as an example of the photoelectric conversion element of thepresent disclosure; however, the present disclosure is not limitedthereto. For example, the photoelectric conversion element of thepresent disclosure may have a configuration in which two organicphotoelectric conversion regions are stacked, or a configuration inwhich two inorganic photoelectric conversion regions are stacked. Inaddition, in the embodiments and the like described above, thephotoelectric converter 10 mainly detects light having a wavelength inthe infrared light range and photoelectrically converts the light, andthe organic photoelectric converter 20 mainly detects light having awavelength in the visible light range and photoelectrically converts thelight; however, the photoelectric conversion element of the presentdisclosure is not limited thereto. In the photoelectric conversionelement of the present disclosure, wavelength ranges to which the firstphotoelectric converter and the second photoelectric converter havesensitivity are freely settable.

In addition, constituent materials of respective components of thephotoelectric conversion element of the present disclosure are notlimited to the materials described in the embodiments and the likedescribed above. For example, in a case where the first photoelectricconverter or the second photoelectric converter receives light in thevisible light region and photoelectrically convert the light, the firstphotoelectric converter or the second photoelectric converter mayinclude a quantum dot.

In addition, in the fifth embodiment described above, the inter-pixelregion light-shielding film 56 is provided between the organicphotoelectric converter 20 and the on-chip lens 54 in the Z-axisdirection; however, the inter-pixel region light-shielding film 56 maybe provided similarly in each of the embodiments and the modificationexamples described above in addition to the fifth embodiment.

In addition, in the embodiments and the like described above, a casewhere one pair of gate electrodes and one pair of electric chargeholding sections that each accumulate electric charges reaching from asecond photoelectric conversion layer through a corresponding one of thepair of gate electrodes are included corresponding to one secondphotoelectric conversion layer is described as an example; however, thepresent disclosure is not limited thereto. One gate electrode and oneelectric charge holding section may be provided corresponding to onesecond photoelectric conversion layer. Alternatively, three or more gateelectrodes and three or more electric charge holding sections may beprovided corresponding to one second photoelectric conversion layer. Inaddition, in the present disclosure, a transistor that reads outelectric charges of the second photoelectric conversion layer is notlimited to a so-called vertical transistor, and may be a planartransistor.

According to a photoelectric conversion element as an embodiment of thepresent disclosure, it is possible to obtain, for example, visible lightimage information having high image quality and infrared light imageinformation including distance information by the configurationdescribed above.

It is to be noted that the effects described herein are merelyillustrative and non-limiting, and other effects may be provided. Inaddition, the present technology may have the following configurations.

(1)

A photoelectric conversion element including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects light in a first wavelength range including avisible light range and photoelectrically converts the light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range including an infrared lightrange and photoelectrically converts the light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(2)

The photoelectric conversion element according to (1), in which thesecond photoelectric converter is configured to obtain distanceinformation of a subject.

(3)

The photoelectric conversion element according to (1) or (2), in whichthe second photoelectric converter includes a second photoelectricconversion layer, a pair of gate electrodes, and a pair of electriccharge holding sections that each accumulate electric charges reachingfrom the second photoelectric conversion layer through a correspondingone of the pair of gate electrodes.

(4)

The photoelectric conversion element according to any one of (1) to (3),in which a plurality of the electric charge accumulation electrodes isprovided corresponding to one of the second photoelectric converters.

(5)

The photoelectric conversion element according to (4), in which

one of the optical filters is provided corresponding to the one secondphotoelectric converter, and

one of the first photoelectric converters is provided corresponding tothe one second photoelectric converter.

(6)

The photoelectric conversion element according to any one of (1) to (5),in which a plurality of the electric charge accumulation electrodes isprovided corresponding to one of the first photoelectric converters.

(7)

The photoelectric conversion element according to any one of (1) to (6),further including an inter-pixel region light-shielding film on incidentside of the second photoelectric converter, the inter-pixel regionlight-shielding film including a plurality of opening portions atpositions corresponding to the second photoelectric converter.

(8)

The photoelectric conversion element according to any one of (1) to (7),further including a through electrode that extracts electric chargesaccumulated in the electric charge accumulation electrode to sideopposite to the second photoelectric converter as viewed from the firstphotoelectric converter.

(9)

The photoelectric conversion element according to (8), further includinga metal layer that surrounds the through electrode with an insulatinglayer interposed therebetween.

(10)

The photoelectric conversion element according to any one of (1) to (9),in which

the semiconductor substrate has a first surface opposed to the firstphotoelectric converter and a second surface on side opposite to thefirst surface, and

a recessed and projected structure is formed on at least one of thefirst surface and the second surface.

(11)

The photoelectric conversion element according to any one of (1) to(10), in which the stacked structure in the first photoelectricconversion layer further includes a semiconductor layer provided betweenthe first electrode and the first photoelectric conversion layer.

(12)

A photodetector provided with a plurality of photoelectric conversionelements, the photoelectric conversion elements each including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects light in a first wavelength range including avisible light range and photoelectrically converts the light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range including an infrared lightrange and photoelectrically converts the light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(13)

The photodetector according to (12), further including a light-shieldingfilm that is positioned between the first photoelectric converter andthe second photoelectric converter and is provided in a region betweenthe photoelectric conversion elements adjacent to each other.

(14)

A photodetection system provided with a light-emitting device that emitsinfrared light and a photodetector that includes a photoelectricconversion element, the photoelectric conversion element including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects visible light from outside and photoelectricallyconverts the visible light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects the infrared light from the light-emitting device andphotoelectrically converts the infrared light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(15)

An electronic apparatus provided with an optical section, a signalprocessor, and a photoelectric conversion element, the photoelectricconversion element including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects light in a first wavelength range including avisible light range and photoelectrically converts the light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range including an infrared lightrange and photoelectrically converts the light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(16)

A mobile body provided with a photodetection system including alight-emitting device and a photodetector, the light-emitting devicethat emits first light included in a visible light range and secondlight included in an infrared light range, the photodetector including aphotoelectric conversion element, the photoelectric conversion elementincluding:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects light in a first wavelength range including thefirst light and photoelectrically converts the light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range including the second lightand photoelectrically converts the light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(17)

A photoelectric conversion element including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, includes a stacked structure including a first electrode, afirst photoelectric conversion layer, and a second electrode that arestacked in order from side of the semiconductor substrate, and detectslight in a first wavelength range and photoelectrically converts thelight;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range and photoelectricallyconverts the light;

a through electrode that is electrically coupled to the first electrode,and extracts electric charges generated in the first photoelectricconversion layer to side opposite to the semiconductor substrate asviewed from the first photoelectric converter; and

a metal layer that surrounds the through electrode with an insulatinglayer interposed therebetween.

(18)

The photoelectric conversion element according to (17), in which themetal layer is provided to surround the second photoelectric converterin a plane orthogonal to a stacking direction where the stackedstructure is stacked.

(19)

An electronic apparatus provided with a photodetection system includinga light-emitting device and a photodetector, the light-emitting devicethat emits first light included in a visible light range and secondlight included in an infrared light range, the photodetector including aphotoelectric conversion element, the photoelectric conversion elementincluding:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, and detects light in a first wavelength range including thefirst light and photoelectrically converts the light;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range including the second lightand photoelectrically converts the light; and

an optical filter that is provided on side, opposite to the secondphotoelectric converter, of the first photoelectric converter, andallows light of a predetermined color component included in apredetermined wavelength range to pass therethrough,

the first photoelectric converter including a stacked structure and anelectric charge accumulation electrode, the stacked structure includinga first electrode, a first photoelectric conversion layer, and a secondelectrode that are stacked in order, and the electric chargeaccumulation electrode being disposed to be separated from the firstelectrode and be opposed to the first photoelectric conversion layerwith an insulating layer interposed therebetween.

(20)

An electronic apparatus provided with an optical section, a signalprocessor, and a photoelectric conversion element, the photoelectricconversion element including:

a semiconductor substrate;

a first photoelectric converter that is provided on the semiconductorsubstrate, includes a stacked structure including a first electrode, afirst photoelectric conversion layer, and a second electrode that arestacked in order from side of the semiconductor substrate, and detectslight in a first wavelength range and photoelectrically converts thelight;

a second photoelectric converter that is provided at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate in the semiconductor substrate, anddetects light in a second wavelength range and photoelectricallyconverts the light;

a through electrode that is electrically coupled to the first electrode,and extracts electric charges generated in the first photoelectricconversion layer to side opposite to the semiconductor substrate asviewed from the first photoelectric converter; and

a metal layer that surrounds the through electrode with an insulatinglayer interposed therebetween.

This application claims the benefit of U.S. Provisional PatentApplication No. 62/864,907 filed with the United States Patent andTrademark Office on Jun. 21, 2019, the entire contents of which areincorporated herein by reference.

It should be understood by those skilled in the art that variousmodifications, combinations, sub-combinations, and alterations may occurdepending on design requirements and other factors insofar as they arewithin the scope of the appended claims or the equivalents thereof.

What is claimed is:
 1. A photoelectric conversion element comprising: asemiconductor substrate; a first photoelectric converter that isprovided above the semiconductor substrate, and that detects andphotoelectrically converts light in a first wavelength range including avisible light range; a second photoelectric converter that is providedin the semiconductor substrate at a position overlapping the firstphotoelectric converter in a thickness direction of the semiconductorsubstrate, and that detects and photoelectrically converts light in asecond wavelength range including an infrared light range; and anoptical filter that is provided above the first photoelectric converter,and that allows light of a predetermined color component included in apredetermined wavelength range to pass therethrough, the firstphotoelectric converter including first and second electrodes, a thirdelectrode, and a first photoelectric conversion layer disposed betweenthe first and second electrodes and the third electrode, the secondphotoelectric converter including a first photoelectric conversionregion, and the optical filter including a first color filter and asecond color filter, wherein the first color filter overlaps the firstelectrode and the first photoelectric conversion region and the secondcolor filter overlaps the second electrode and the first photoelectricconversion region, and wherein the first color filter is configured toallow light of a first predetermined color component to passtherethrough and the second color filter is configured to allow light ofa second predetermined color component which is different than the firstpredetermined color component to pass therethrough.
 2. The photoelectricconversion element according to claim 1, wherein the secondphotoelectric converter is configured to obtain distance information ofa subject.
 3. The photoelectric conversion element according to claim 1,wherein the second photoelectric converter includes a pair of gateelectrodes, and a pair of electric charge holding sections that eachaccumulate electric charges that travel from the first photoelectricconversion region through a corresponding one of the pair of gateelectrodes.
 4. The photoelectric conversion element according to claim1, wherein a plurality of electric charge accumulation electrodes areprovided for the second photoelectric converter.
 5. The photoelectricconversion element according to claim 1, wherein the first photoelectricconverter includes a readout electrode disposed separately from thefirst and second electrodes, and wherein the first photoelectricconversion layer is disposed between the readout electrode and the thirdelectrode, and wherein an insulating layer is between the firstphotoelectric conversion layer and the first and second electrodes. 6.The photoelectric conversion element according to claim 1, wherein aplurality of first electrodes are provided for the first photoelectricconverter.
 7. The photoelectric conversion element according to claim 1,further comprising an inter-pixel region light-shielding film on a lightincident side of the second photoelectric converter, the inter-pixelregion light-shielding film including a plurality of opening portions atpositions corresponding to the second photoelectric converter.
 8. Thephotoelectric conversion element according to claim 1, furthercomprising a through electrode that extracts electric chargesaccumulated in the first electrode or the second electrode to a sideopposite to the second photoelectric converter as viewed from the firstphotoelectric converter.
 9. The photoelectric conversion elementaccording to claim 8, further comprising a metal layer that surroundsthe through electrode with the insulating layer interposed therebetween.10. The photoelectric conversion element according to claim 1, whereinthe semiconductor substrate has a first surface opposed to the firstphotoelectric converter and a second surface opposite to the firstsurface, and a recessed and projected structure is formed on at leastone of the first surface and the second surface.
 11. The photoelectricconversion element according to claim 1, wherein the first photoelectricconverter further includes a semiconductor layer provided between thefirst electrode and the first photoelectric conversion layer.
 12. Thephotoelectric conversion element according to claim 1, wherein the firstphotoelectric converter includes fourth and fifth electrodes, the firstphotoelectric conversion layer being disposed between the fourth andfifth electrodes and the third electrode, wherein the secondphotoelectric converter includes a second photoelectric conversionregion, wherein the optical filter includes a third color filter and afourth color filter, wherein the third color filter overlaps the fourthelectrode and the second photoelectric conversion region and the fourthcolor filter overlaps the fifth electrode and the second photoelectricconversion region, and wherein the third color filter is configured toallow light of the first predetermined color component to passtherethrough and the fifth color filter is configured to allow light ofthe second predetermined color component to pass therethrough.
 13. Aphotodetector comprising: a plurality of photoelectric conversionelements, at least one of the photoelectric conversion elementscomprising: a semiconductor substrate; a first photoelectric converterthat is provided above the semiconductor substrate, and that detects andphotoelectrically converts light in a first wavelength range including avisible light range; a second photoelectric converter that is providedin the semiconductor substrate at a position overlapping the firstphotoelectric converter in a thickness direction of the semiconductorsubstrate, and that detects light in a second wavelength range includingan infrared light range and photoelectrically converts the light; and anoptical filter that is provided above first photoelectric converter, andthat allows light of a predetermined color component included in apredetermined wavelength range to pass therethrough, the firstphotoelectric converter including first and second electrodes, a thirdelectrode, and a first photoelectric conversion layer disposed betweenthe first and second electrodes and the third electrode, the secondphotoelectric converter including a first photoelectric conversionregion, the optical filter including a first color filter and a secondcolor filter, wherein the first color filter overlaps the firstelectrode and the first photoelectric conversion region and the secondcolor filter overlaps the second electrode and the first photoelectricconversion region, and wherein the first color filter is configured toallow light of a first predetermined color component to passtherethrough and the second color filter is configured to allow light ofa second predetermined color component which is different than the firstpredetermined color component to pass therethrough.
 14. Thephotodetector according to claim 13, further comprising alight-shielding film that is positioned between the first photoelectricconverter and the second photoelectric converter in a region betweenadjacent photoelectric conversion elements.
 15. A photodetection systemcomprising: a light-emitting device that emits infrared light and aphotodetector that includes a photoelectric conversion element, thephotoelectric conversion element comprising: a semiconductor substrate;a first photoelectric converter that is provided above the semiconductorsubstrate, and that detects and photoelectrically converts visiblelight; a second photoelectric converter that is provided in thesemiconductor substrate at a position overlapping the firstphotoelectric converter in a thickness direction of the semiconductorsubstrate, and that detects and photoelectrically converts the infraredlight from the light-emitting device; and an optical filter that isprovided above the first photoelectric converter, and that allows lightof a predetermined color component included in a predeterminedwavelength range to pass therethrough, the first photoelectric converterincluding first and second electrodes, a third electrode, and a firstphotoelectric conversion layer disposed between the first and secondelectrodes and the third electrode, the second photoelectric converterincluding a first photoelectric conversion region, and the opticalfilter including a first color filter and a second color filter, whereinthe first color filter overlaps the first electrode and the firstphotoelectric conversion region and the second color filter overlaps thesecond electrode and the first photoelectric conversion region, andwherein the first color filter is configured to allow light of a firstpredetermined color component to pass therethrough and the second colorfilter is configured to allow light of a second predetermined colorcomponent which is different than the first predetermined colorcomponent to pass therethrough.
 16. An electronic apparatus comprising:an optical section, a signal processor, and a photoelectric conversionelement, the photoelectric conversion element comprising: asemiconductor substrate; a first photoelectric converter that isprovided above the semiconductor substrate, and that detects andphotoelectrically converts light in a first wavelength range including avisible light range; a second photoelectric converter that is providedin the semiconductor substrate at a position overlapping the firstphotoelectric converter in a thickness direction of the semiconductorsubstrate, and that detects and photoelectrically converts light in asecond wavelength range including an infrared light range; and anoptical filter that is provided above the first photoelectric converter,and that allows light of a predetermined color component included in apredetermined wavelength range to pass therethrough, the firstphotoelectric converter including first and second electrodes, a thirdelectrode, and a first photoelectric conversion layer disposed betweenthe first and second electrodes and the third electrode, the secondphotoelectric converter including a first photoelectric conversionregion, and the optical filter including a first color filter and asecond color filter, wherein the first color filter overlaps the firstelectrode and the first photoelectric conversion region and the secondcolor filter overlaps the second electrode and the first photoelectricconversion region, and wherein the first color filter is configured toallow light of a first predetermined color component to passtherethrough and the second color filter is configured to allow light ofa second predetermined color component which is different than the firstpredetermined color component to pass therethrough.
 17. A mobile bodycomprising: a photodetection system including a light-emitting deviceand a photodetector, the light-emitting device emitting first light in avisible light range and second light in an infrared light range, thephotodetector including a photoelectric conversion element, thephotoelectric conversion element comprising: a semiconductor substrate;a first photoelectric converter that is provided above the semiconductorsubstrate, and that detects and photoelectrically converts light in afirst wavelength range including the first light; a second photoelectricconverter that is provided in the semiconductor substrate at a positionoverlapping the first photoelectric converter in a thickness directionof the semiconductor substrate, and that detects and photoelectricallyconverts light in a second wavelength range including the second light;and an optical filter that is provided above the first photoelectricconverter, and that allows light of a predetermined color componentincluded in a predetermined wavelength range to pass therethrough, thefirst photoelectric converter including first and second electrodes, athird electrode, and a first photoelectric conversion layer disposedbetween the first and second electrodes and the third electrode, thesecond photoelectric converter including a first photoelectricconversion region, and the optical filter including a first color filterand a second color filter, wherein the first color filter overlaps thefirst electrode and the first photoelectric conversion region and thesecond color filter overlaps the second electrode and the firstphotoelectric conversion region, and wherein the first color filter isconfigured to allow light of a first predetermined color component topass therethrough and the second color filter is configured to allowlight of a second predetermined color component which is different thanthe first predetermined color component to pass therethrough.
 18. Aphotoelectric conversion element comprising: a semiconductor substrate;a first photoelectric converter that is provided above the semiconductorsubstrate, that includes first and second electrodes, a third electrode,and a first photoelectric conversion layer disposed between the firstand second electrodes and the third electrode, and that detects andphotoelectrically converts light in a first wavelength range; a secondphotoelectric converter that is provided in the semiconductor substrateat a position overlapping the first photoelectric converter in athickness direction of the semiconductor substrate, and that detects andphotoelectrically converts light in a second wavelength range; a throughelectrode that is electrically coupled to the first electrode, and thatextracts electric charges generated in the first photoelectricconversion layer to a side opposite to the semiconductor substrate asviewed from the first photoelectric converter; and a metal layer thatsurrounds the through electrode with an insulating layer interposedtherebetween, the second photoelectric converter including a firstphotoelectric conversion region, and an optical filter including a firstcolor filter and a second color filter, wherein the first color filteroverlaps the first electrode and the first photoelectric conversionregion and the second color filter overlaps the second electrode and thefirst photoelectric conversion region, and wherein the first colorfilter is configured to allow light of a first predetermined colorcomponent to pass therethrough and the second color filter is configuredto allow light of a second predetermined color component which isdifferent than the first predetermined color component to passtherethrough.
 19. The photoelectric conversion element according toclaim 18, wherein the metal layer is provided to surround the secondphotoelectric converter in a plane orthogonal to the thicknessdirection.
 20. An electronic apparatus comprising: a photodetectionsystem including a light-emitting device and a photodetector, thelight-emitting device emitting first light in a visible light range andsecond light in an infrared light range, the photodetector including aphotoelectric conversion element, the photoelectric conversion elementcomprising: a semiconductor substrate; a first photoelectric converterthat is provided above the semiconductor substrate, and that detects andphotoelectrically converts light in a first wavelength range includingthe first light; a second photoelectric converter that is provided inthe semiconductor substrate at a position overlapping the firstphotoelectric converter in a thickness direction of the semiconductorsubstrate, and that detects and photoelectrically converts light in asecond wavelength range including the second light; and an opticalfilter that is provided above the first photoelectric converter, andthat allows light of a predetermined color component included in apredetermined wavelength range to pass therethrough, the firstphotoelectric converter including first and second electrodes, a thirdelectrode, and a first photoelectric conversion layer disposed betweenthe first and second electrodes and the third electrode, the secondphotoelectric converter including a first photoelectric conversionregion, and the optical filter including a first color filter and asecond color filter, wherein the first color filter overlaps the firstelectrode and the first photoelectric conversion region and the secondcolor filter overlaps the second electrode and the first photoelectricconversion region, and wherein the first color filter is configured toallow light of a first predetermined color component to passtherethrough and the second color filter is configured to allow light ofa second predetermined color component which is different than the firstpredetermined color component to pass therethrough.
 21. An electronicapparatus comprising: an optical section, a signal processor, and aphotoelectric conversion element, the photoelectric conversion elementcomprising: a semiconductor substrate; a first photoelectric converterthat is provided above the semiconductor substrate, that includes firstand second electrodes, a third electrode, and a first photoelectricconversion layer disposed between the first and second electrodes andthe third electrode, and that detects and photoelectrically convertslight in a first wavelength range; a second photoelectric converter thatis provided in the semiconductor substrate at a position overlapping thefirst photoelectric converter in a thickness direction of thesemiconductor substrate, and that detects and photoelectrically convertslight in a second wavelength range; a through electrode that iselectrically coupled to the first electrode, and that extracts electriccharges generated in the first photoelectric conversion layer to a sideopposite to the semiconductor substrate as viewed from the firstphotoelectric converter; and a metal layer that surrounds the throughelectrode with an insulating layer interposed therebetween, the secondphotoelectric converter including a first photoelectric conversionregion, and an optical filter including a first color filter and asecond color filter, wherein the first color filter overlaps the firstelectrode and the first photoelectric conversion region and the secondcolor filter overlaps the second electrode and the first photoelectricconversion region, and wherein the first color filter is configured toallow light of a first predetermined color component to passtherethrough and the second color filter is configured to allow light ofa second predetermined color component which is different than the firstpredetermined color component to pass therethrough.